5工艺排气技术规范.docx

5工艺排气技术规范.docx

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5工艺排气技术规范

中芯国际集成电路制造（上海）有限公司

FAB8厂新建工程

技術規範

（TechnicalSpecification）

第20015章

工艺排气技术规范

TableofContents

1.Statementofwork

Thescopeofworkincludesfollowingsystems

∙Processexhaustairsystemsincl.scrubbers,chemicaldosingsystem,scrubber/ductdrainstothemaindrainsystem,fans,stacksandductwork

∙

∙ElectricalsystemincludingMCC,VFD,UPS/DCBank,cablingetcforExhaustPackage

∙

∙ControlSystemincludingfielddevicesandlocalSCADAforExhaustPackage

∙

Thescopeofworkshallcover

∙Thedetailedengineering（incl.SpacemanagementforFab8）

∙

∙Furnishingofallmaterials,labor,equipment

∙

∙Constructionandinstallation

∙

∙Transportandassembly（incl.seaworthypackaging）

∙

∙Commissioning,testingandacceptance

∙

∙Service

∙

∙Documentation,asbuiltdrawingsandO&M（inChinese）

∙

∙Qualityassuranceandcontrol

∙

∙ContinuousQualityMonitoring

∙

∙Trainingofownerandownerspersonnel

∙

∙Operation（untilhand-overofthecontrol-system）

∙

AdetailedresponsibilitymatrixisgiveninAttachment1.

ThesystemshallsupplyanexhaustpackageintherequiredquantityandqualitytoFab8.

SMICFabnamingconventionisasfollows:

Fab8

Therequiredcapacities,quantitiesandsystemdesignaredefinedinchapterSystemDescription.Theinstallationshallbesuitableforcontinuousoperation100%oftime.

Allupgradesandextensionsofthesystemshallbepossiblewithoutinterruptionordeteriorationofthesystemoperation.

Thequalitymonitoringsystemshallusehighaccuracyon-lineinstrumentation,automateddataacquisition,out-of-tolerancealertingandalarmingandtrending（seechapterElectrical,ControlsandMonitoringfordetails）.Thesystemshallincorporatethebestavailableandcost-effectivetechnologyandbecapableofbeingmodifiedwithminimumimpacttomanufacturinglinesasnewequipmentbecomesavailable.

AllSCADAdatashallbemadeavailabletothecentralFMCSsystem,ifrequiredbytheOwner.

Underthetermcompletesystemsisunderstood,i.e.formpartofthescopeworkoftheContractor:

∙Deliveryandinstallationofallrequiredmaterials,components,auxiliaries,fittings,fastenings,supports

∙

∙Alltemporaryprovisionsincl.allmeansandprovisions（temporaryandpermanent）forvertical/horizontaltransportation

∙

∙Alltemporaryprovisions,siteofficesandrequiredutilitiesforstart-upandcertifications

∙

∙Operation,maintenance,monitoringandreportingetc（limitedforperiodfromcommissioningtofinalacceptance）

∙

Contractorshallalsoinstallallinterconnectingpipingbetweenpartsofthesystem.

Constructionmanagementshallformpartofthescopeofthecontractor.Installationshallbedoneinconditionsasperspecificationsofthisbidpackage.TheContractorshallberesponsibleformaintainingcleanconditionandgoodhousekeepingintheareasandallotherrelevantroomsorareas,wheretheContractorpersonnelworks.

Thecontractorshallbeliablefortheoverallperformancesoftheexhaustpackageaspercontract.Thisshallberepeatedafterlayoutchangesandtheresultingchangesinconsumption,ifrequiredbytheOwner,seechapterProjectControlsandDocumentation.

Allprovisions,utilitiesandlabornecessaryforthesafeandreliableinstallation/operationofthetotalexhaustpackage,suchassiteofficesetc.shallbepartofthescopeoftheContractor,evenifnotspecificallymentioned.

2.

Systemdescription

2.

2.1General

2.2

ProcessexhaustisrequiredtoservemanufacturingandsupporttoolswithintheproductionareasofFab8.

Fourseparateexhaustsystemsaretobeinstalled,namelyscrubbed,ammonia,generalandsolvent.Theexhaustsystemsaretobeseparatedbasedupontheareaserved.Fab8willbeservedwithaseparateexhaustsystemfromFab8.Foradetaileddefinitionofsystemcoverageforthisbidpackage,pleaserefertothedesigndrawings.

Thesesystemsaretobedesignedtomaintainalevelofexhaustatthemostremotepointinthedistributionsystem.Restrictedpollutantscontainedwithintheextractedairaretobetreatedpriortobeingdischargedtotheenvironment.ThepollutioncontrolmeasureistobeconsideredforeachexhaustsystemsandistobecompliantwithlocalcodesinadditiontotherequirementsofSMIC.

Tocrossfirezoneswiththeductworktheexhaustsystemvendormustfollowlocalcodes,FM-regulationsandSMICrequirements.

Drainpointsforcondensateshouldbeinstalledinmainductsinsufficientquantityandateverylowpointintheductwork.Allexhaustcondensatedrainsshallbeconnectedtothemainprocessdrainsystem.

AllprocessdrainsaretogetaconnectiontoscrubbedexhaustsystemtoventvaporfumesfromthePDSdrains.

Thesystemsaretocompriseofmainductandsub-mainducts.Apressuredifferentialtransmitterwillbeinstalledatendofthemostremotemainductforeachexhaustsystemformonitoringpurpose.Twopressuredifferentialtransmitters（connectingtoseparateAIcardsfortrueredundancy）willbeinstalledatsuctionheaderforeachexhaustsystem.TheyareusedforcontrollingtheVFDoutput/fanspeed.

Eachsub-mainshallbeequippedwithapressureindicatorgaugeforvisualpressurecheckattheendofthesub-mainandalockablemanualdamperforairflowcontrol,alsoacappedmeasuringportforairflowspeed/pressure/contentmeasurements.

HangersinthesubfabincludeC-profilesatthewaffleslabandvibrationisolators.Additionalvibration-dampedhangersaretobeinstalledonthesub-mainsinthePhotolithographyArea.

Gratingsateachlevelintheexhaustductshaftbelongtothescopeoftheexhaustsystem,includingremovablemaintenanceopeningonthebottomofthefacetpanelandastepladder.I-beamsupportsattachedtothebuildingsteelstructurefortheexhaustriserductsarepartoftheexhaustsystemscope.

Onepressurerelievedamperwillbeinstalledinthemainheadertopreventtoomuchunderpressureintheductworksystem.Theductshavetobeequippedwithsufficientopeningsformaintenanceofdampersandscrubbersinthemanifoldsetc.

Forductworklayoutandrouting,pleaserefertothedesigndrawings.

Forsafetyreasons150mmC-Profileshavetobeinstalledunderneathmainductsasfall-downprotectionandadditionalsupport（every4.2m）.

2.3AcidScrubbedandAmmoniaExhaust

2.4

Theacidscrubbedexhaustsystemisdesignedfortheremovalofaircontainingacidsfromtheprocessequipmentintheproductionarea.Theammoniaexhaustsystemisdesignedfortheremovalofaircontainingammoniafromtheprocessequipmentintheproductionarea.

Independentsystemsshallbeprovidedforscrubbedandammoniaexhaust.Eachsystemshallbeprovidedwithstandbycapacity.

Acid/Ammoniaexhaustsystemscomprisesofthefollowingelements:

∙exhaustfans

∙

∙wetscrubbers

∙

∙distributionductwork

∙

∙mainheadersandmanifolds

∙

∙exhauststacks（FRP）

∙

Thetotalspecifieddesignvolumeofacidcontaminatedairtobeexhaustedisapproximately*****CMH（with*****CMHstandby）.Thetotalspecifiedvolumeofammoniacontaminatedairtobeexhaustedisapproximately*****CMH（with*****CMHstandby）.

Fiveacidscrubbers/fans（included:

onestandbyscrubber/fan）aretobeinstalledinFab8Level3.Thescrubbersshallbeinstalledtoreducepollutiontolocalauthorityrequirements.Thereisamanifold（mainheader）connectingthescrubbersforeachsystemonthesuctionsideandoneonthedischargeside.

Eachsub-mainistobeequippedwithatestporttoallowmeasurementbyapressure/airspeedtestingprobe（Testo400）.Eachsub-mainshallalsobeequippedwithapressureindicatorgaugeforvisualpressurecheckattheendofthesub-mainandamanualdamperforairflowcontrol.

Onepressurerelievedamperwillbeinstalledinthemainheadertoprotecttheductworksystemfromdamageduetotoomuchunderpressure.

ThechemicalsupplysystemswillbeinstalledforthescrubbersonFab8Level3（NaOHforSEXscrubbersandH2SO4forAEXscrubbers）.FromtheNaOH/H2SO4storagetanksonFab9Level1（storagetanksandfillingstationsareinthescopeoftheFAB9ProcessExhaustSysteminStage1.Instage2,theNaOHwillcomefromthecommonstoragetankonCUB4Level1andH2SO4willbefromthewasteacidtank.）,Thesupplysystemshallincludetwopumpsforeachchemical（magnetic-coupled,plasticlining）,doublecontainmentpipingfromcommonchemicalstoragetankstothedailytanks,dailytanksincludingcontrolpanelandallaccessories.Theamountsofthechemicalsusedaretobemonitoredwithvolumeflowmeasuringdevicesandshownontheexhaustsystemcomputermonitor.Thecompleteandfunctionalchemicaldosingsystemsareincludedintheprocessexhaustsystempackage.

Thescrubberblow-downandcondensatedrainswillbeconnectedtomainPDSdrainonFab8Level1（drainspipingincludedinexhaustpackage）.ThecondensatedrainsforthemainrisersmustalsobedrainedtodesignatedlocationsonLevel1,thenpumpedtothePDSdrain（SEX）ortheappropriatecollectiontank（AEX）.

Theprocessedcleanairwillbedischargedthroughstacks.Theductworksystemincludingstacksmustbeacid/ammonia（chemical）andcorrosionresistant.TheductworkmaterialmustbeFMcertified,ETFE/ECTFE（fluoropolymer）coatedstainlesssteel304.TheductworksysteminFAB8mustbeprovidedwithapneumaticoperatedunderpressureprotectiondamperinstalledonthemainheader,whichcanalsobeusedasby-passdamperformaintenanceandtestingpurpose.Allsub-mainsaretobeequippedwithpressureindicatorsattheendsforvisualpressurecheck.ThescrubbersandstacksaremadeofFRP.Themainheader