5工艺排气技术规范.docx

1、5工艺排气技术规范中芯国际集成电路制造(上海)有限公司FAB 8 厂新建工程技 術 規 範(Technical Specification)第20015章工艺排气技术规范Table of Contents1. Statement of work The scope of work includes following systems Process exhaust air systems incl. scrubbers, chemical dosing system, scrubber / duct drains to the main drain system, fans, stacks a

2、nd ductworkElectrical system including MCC, VFD, UPS / DC Bank, cabling etc for Exhaust PackageControl System including field devices and local SCADA for Exhaust PackageThe scope of work shall cover The detailed engineering (incl. Space management for Fab 8)Furnishing of all materials, labor, equipm

3、entConstruction and installationTransport and assembly (incl. seaworthy packaging)Commissioning, testing and acceptanceServiceDocumentation, as built drawings and O&M (in Chinese)Quality assurance and controlContinuous Quality MonitoringTraining of owner and owners personnelOperation (until hand-ove

4、r of the control-system) A detailed responsibility matrix is given in Attachment 1.The system shall supply an exhaust package in the required quantity and quality to Fab 8.SMIC Fab naming convention is as follows:Fab 8The required capacities, quantities and system design are defined in chapter Syste

5、m Description. The installation shall be suitable for continuous operation 100% of time.All upgrades and extensions of the system shall be possible without interruption or deterioration of the system operation.The quality monitoring system shall use high accuracy on-line instrumentation, automated d

6、ata acquisition, out-of-tolerance alerting and alarming and trending (see chapter Electrical, Controls and Monitoring for details). The system shall incorporate the best available and cost-effective technology and be capable of being modified with minimum impact to manufacturing lines as new equipme

7、nt becomes available. All SCADA data shall be made available to the central FMCS system, if required by the Owner.Under the term complete systems is understood, i.e. form part of the scope work of the Contractor: Delivery and installation of all required materials, components, auxiliaries, fittings,

8、 fastenings, supportsAll temporary provisions incl. all means and provisions (temporary and permanent) for vertical/horizontal transportationAll temporary provisions, site offices and required utilities for start-up and certificationsOperation, maintenance, monitoring and reporting etc (limited for

9、period from commissioning to final acceptance)Contractor shall also install all interconnecting piping between parts of the system. Construction management shall form part of the scope of the contractor. Installation shall be done in conditions as per specifications of this bid package. The Contract

10、or shall be responsible for maintaining clean condition and good housekeeping in the areas and all other relevant rooms or areas, where the Contractor personnel works.The contractor shall be liable for the overall performances of the exhaust package as per contract. This shall be repeated after layo

11、ut changes and the resulting changes in consumption, if required by the Owner, see chapter Project Controls and Documentation.All provisions, utilities and labor necessary for the safe and reliable installation / operation of the total exhaust package, such as site offices etc. shall be part of the

12、scope of the Contractor, even if not specifically mentioned.2. System description2.2.1General2.2Process exhaust is required to serve manufacturing and support tools within the production areas of Fab 8.Four separate exhaust systems are to be installed, namely scrubbed, ammonia, general and solvent.

13、The exhaust systems are to be separated based upon the area served. Fab 8 will be served with a separate exhaust system from Fab 8. For a detailed definition of system coverage for this bid package, please refer to the design drawings.These systems are to be designed to maintain a level of exhaust a

14、t the most remote point in the distribution system. Restricted pollutants contained within the extracted air are to be treated prior to being discharged to the environment. The pollution control measure is to be considered for each exhaust systems and is to be compliant with local codes in addition

15、to the requirements of SMIC.To cross fire zones with the ductwork the exhaust system vendor must follow local codes, FM-regulations and SMIC requirements.Drain points for condensate should be installed in main ducts in sufficient quantity and at every low point in the ductwork. All exhaust condensat

16、e drains shall be connected to the main process drain system.All process drains are to get a connection to scrubbed exhaust system to vent vapor fumes from the PDS drains.The systems are to comprise of main duct and sub-main ducts. A pressure differential transmitter will be installed at end of the

17、most remote main duct for each exhaust system for monitoring purpose. Two pressure differential transmitters (connecting to separate AI cards for true redundancy) will be installed at suction header for each exhaust system. They are used for controlling the VFD output / fan speed.Each sub-main shall

18、 be equipped with a pressure indicator gauge for visual pressure check at the end of the sub-main and a lockable manual damper for airflow control, also a capped measuring port for air flow speed/pressure/content measurements.Hangers in the subfab include C-profiles at the waffle slab and vibration

19、isolators. Additional vibration-damped hangers are to be installed on the sub-mains in the Photolithography Area.Gratings at each level in the exhaust duct shaft belong to the scope of the exhaust system, including removable maintenance opening on the bottom of the facet panel and a stepladder. I-be

20、am supports attached to the building steel structure for the exhaust riser ducts are part of the exhaust system scope.One pressure relieve damper will be installed in the main header to prevent too much underpressure in the ductwork system. The ducts have to be equipped with sufficient openings for

21、maintenance of dampers and scrubbers in the manifolds etc.For ductwork layout and routing, please refer to the design drawings.For safety reasons 150mm C-Profiles have to be installed underneath main ducts as fall-down protection and additional support (every 4.2 m).2.3Acid Scrubbed and Ammonia Exha

22、ust2.4The acid scrubbed exhaust system is designed for the removal of air containing acids from the process equipment in the production area. The ammonia exhaust system is designed for the removal of air containing ammonia from the process equipment in the production area.Independent systems shall b

23、e provided for scrubbed and ammonia exhaust. Each system shall be provided with standby capacity. Acid / Ammonia exhaust systems comprises of the following elements:exhaust fanswet scrubbersdistribution ductworkmain headers and manifoldsexhaust stacks (FRP)The total specified design volume of acid c

24、ontaminated air to be exhausted is approximately * CMH (with * CMH standby). The total specified volume of ammonia contaminated air to be exhausted is approximately * CMH (with * CMH standby).Five acid scrubbers / fans (included: one standby scrubber / fan) are to be installed in Fab 8 Level 3. The

25、scrubbers shall be installed to reduce pollution to local authority requirements. There is a manifold (main header) connecting the scrubbers for each system on the suction side and one on the discharge side.Each sub-main is to be equipped with a test port to allow measurement by a pressure / air spe

26、ed testing probe (Testo 400). Each sub-main shall also be equipped with a pressure indicator gauge for visual pressure check at the end of the sub-main and a manual damper for airflow control.One pressure relieve damper will be installed in the main header to protect the ductwork system from damage

27、due to too much underpressure.The chemical supply systems will be installed for the scrubbers on Fab8 Level 3 (NaOH for SEX scrubbers and H2SO4 for AEX scrubbers). From the NaOH / H2SO4 storage tanks on Fab 9 Level 1 (storage tanks and filling stations are in the scope of the FAB 9 Process Exhaust S

28、ystem in Stage 1. In stage 2, the NaOH will come from the common storage tank on CUB 4 Level 1 and H2SO4 will be from the waste acid tank.), The supply system shall include two pumps for each chemical (magnetic-coupled, plastic lining), double containment piping from common chemical storage tanks to

29、 the daily tanks, daily tanks including control panel and all accessories. The amounts of the chemicals used are to be monitored with volume flow measuring devices and shown on the exhaust system computer monitor. The complete and functional chemical dosing systems are included in the process exhaus

30、t system package.The scrubber blow-down and condensate drains will be connected to main PDS drain on Fab8 Level 1 (drains piping included in exhaust package). The condensate drains for the main risers must also be drained to designated locations on Level 1, then pumped to the PDS drain (SEX) or the

31、appropriate collection tank (AEX).The processed clean air will be discharged through stacks. The ductwork system including stacks must be acid / ammonia (chemical) and corrosion resistant. The ductwork material must be FM certified, ETFE / ECTFE (fluoropolymer) coated stainless steel 304. The ductwo

32、rk system in FAB 8 must be provided with a pneumatic operated underpressure protection damper installed on the main header, which can also be used as by-pass damper for maintenance and testing purpose. All sub-mains are to be equipped with pressure indicators at the ends for visual pressure check. The scrubbers and stacks are made of FRP. The main header