Wire Bonding Technology.docx

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Wire Bonding Technology.docx

WireBondingTechnology

WireBondingProcess

Editor:

Thomas-ma

1.BallShearTest-FailureModeGradingMethod

Thefailuremodesusedintheballsheartesthelptoevaluatethebondingresultsandassessthebondingprocess.

FailureModes:

∙Ballliftindicatesbadresults(low F):

∙Goldremainindicatesgoodresults(high F)

∙Padpeelingorcrateringindicatesaflowthatshouldbeinvestigated

Factorsaffectingthe F:

∙Bondedarea(D)

∙Process

∙Shearheight(5um)

∙Toolsize(min2X D)

∙Balltoolcentering

∙Cleanliness

∙Testercalibration,accuracyandvacuum

2.WirePullTest-FailureModeGradingMethod

Thefailuremodesusedinthewirepulltesthelptoevaluatethebondingresultsandassessthebondingprocess.

Grade

Brokenat

Reason

Quality

1

Balllift

Badprocess

Poor

2

Ballneck

H.A.Z

Good

3

Wire

Dependsonconditions

Verygood

4

Weld

Welddeformation

Good

5

Stitchlift

Badprocess

Poor

 

Factorsaffectingthe F:

∙Wirediameter

∙Wirelength

∙Loopheight

∙Padtoleadplanegap

∙Process

∙Hooklocation

Testercalibration,accuracyandvacuum

3.ballheight(thickness)

ball(1stbond) 

3.Bottleneck(BTNK)CapillaryBonding

4.Bottleneck CapillariesTolerancesTable

Family/Design

BondPadPitch

SpecRange

Tolerances(mils)

Tip

Hole

CD

OR

4149X

4849X

Above

100um

Regular

ForTip>10�0.3

ForHole≥2.5

+0.25/-0.1

�0.2

ForOR>3.5

�0.3

ForTip≤10�0.2

For1.8

+0.2/-0.1

�0.2

ForOR≤3.5

�0.2

 

ForHole≤1.8

+0.15/-0.1

�0.2

 

High

Spec

�0.1

-0.1/-0.0

�0.1

�0.2

5.Loopheight measuring

6.OpticalMeasurements

Usuallythisisthefirstsetofexaminationstobeperformed,usingaScanningElectronMicroscope(SEM)andadvancedopticalequipment.

Theseexaminationsareperformedbothpriortothebondingprocess-todeterminethebesttoolandprocessparameters-andafteritscompletion-toevaluatethebondingresults.Theseexaminationsconsistof:

∙Inspectionofthe package/devicedimensions,whichassistsinsettingtheprocessspecifications,determiningthewiringconstraintsanddesigningthebest-suitedcapillary.

∙Inspectionofthe bondpadandpitch andrelateddimensions,whichassistsindeterminingtherequiredbondpadopening,padsgap,padsizeandpadpitch.Thisalsohelpstodeterminethebondableareaandtherequiredcrosssection(accordingtopassivationlayer andpadlayerthickness).

∙Inspectionofthe wiringmeasurements,whichassistindefiningtherequiredballsize,ballheight,ballplacementaccuracy,loopheightandwireswaytolerances.

∙Thepostbondinginspectionsinclude ball(1stbond)diameter measuring, ballheight(thickness)measuringand Loopheight measuring.

7.BondPadPitch

Thebondpadpitchisadefineddistancebetweenthecentersoftwoadjacentpads.Thedesiredpadpitch,derivedfromtheapplicationconstraints,prescribesthetypeofcapillaryoneshoulduse.

Thecapillary'sexternaldimensions(Tip, BTNK, CA)needtobeoptimizedinordertoavoidcontactbetweenthecapillaryandtheadjacentwirewhilemaintainingoptimalbondingperformances.

8.The1stbonddiameterisderivedfromthe padopening.

Mostapplicationsrequirea100%bondonpad.Themostimportantcapillaryparameteraffectingthein-specaccuracyofthe1stbondisthe IC volume,whichconsistsofthe Hole diameter,the ICA and CD. 

Thisparameterneedstobecarefullycontrolledandoptimizedinwaysthatshallbediscussedlater.

9.WireDiameter

Thewirediameterisdefinedbytheapplication-finerprocessesnaturallyemploythinnerwires.Therefore.thecapillary Hole isdefinedbythedesiredwirediameter.

Generally,thickwiresarepreferableduetotheirstrengthandbetterresistancetosweepduringmolding.However,thereisadelicatebalancebetweenHoleandwirethatneedstobeobservedinordertomaintainthecriticalgapthatallowsthefreeanduninhibitedmovementofthewire.Thiscriticalgapisimperativeforthesuccessoftheprocessandeliminatingincidentsofwireswayandwirefriction.

Anotherfactorinfluencingthewirediameterselectionisthecostofthe goldwire.

10.K&SCapillaryDesignRecommendations

WireDiameter(mil)

RecommendedHole(mil)

Min.RecommendedHole(mil)

2.00

3.00

2.40

1.50

2.20

1.80

1.30

1.80

1.50

1.20

1.70

1.40

1.10

1.60

1.30

1.00

1.50

1.20

0.90

1.20

1.10

0.80

1.00

0.95

0.70

0.90

0.85

11.TechnicalGuide

Goodbondingresultsaretheprimarygoalofeverybondingprocess.Theseresultsarethencomparedto thespecifications(SPEC)definedbythesemiconductormanufacturerandjudgedbytheirdeviationfromthatSPEC.

Thesemiconductormanufacturerseeksprocessreliabilityatlowercostsandhigheryields.Theseobviousbusinesstargetsareachievedthrougharepeatableandstablebondingprocess.Processstabilityismeasuredaccordingtothefollowingperformancespecifications:

∙FreeAirBalldiameter(min,max,std,Cpk)

∙Balldiameter&height(min,max,std,Cpk)

∙Loopheight&shape(min,max,std,Cpk)

∙Ballshearforce&Strength(min,Cpk)

∙Wirepullforce(min,Cpk)

∙Ballplacementaccuracy(min,Cpk)

∙Confirmationrun(stability,numberofassists,visualinspection, UPH)

∙Capillarydimensionstolerances(SPECs,effectonprocess,lifetime)

∙Overallprocessfeasibility(cost,demand,timetomarket)

K&SBondingToolshasdesigned advancedperformancetests todeterminewhetherspecificationsweremet.

Understandingtherelationshipbetweencapillarydimensionsandbondingresultsisthekeytocontrollingthebondingprocess.Everytoolhasmorethan15differentparametersthatdeterminethebondingresults.Theseparameters,alongwithvariousotherfactorssuchasthebondingmachine,thewireandthedevicemakeupthecomplexenvironmentthatinfluencestheprocess.ThisenvironmentisanalyzedbybondingexpertsinK&SapplicationlabsandR&Dcenters.Thefollowingisageneraldescriptionofthecapillary-processrelationsthatbynomeansconcludethebondingresultsanalysis.

12.BallShearTest

TheballsheartestisperformedusingaShearTester(BT-24,BT-2400PC,DAGE4000)andaShearTool.

Thetestisconsistentwiththefollowingmethodology:

1.Measureballdiameter(D)andballheight(H),andthencalculatethe"bondedarea"(S).

S=[(D^2)/4]*p in[mil]^2or[um]^2.

2.Fixshearheightaccordingtoballheightandpassivationthickness.

3.PerformShearforcetest.TheShearforce(F)ismeasuredin[gr.].

4.Theforcevalueobtainediscalculatedasfollows:

 

S/u_a(Shearperunitarea)=Shear/[pD2/4].

Reasonablestrengthrange=5.5andabove[gr.]/[mil]2

13.TheEffectonthe1stBond

The1stbondisprimarilyaffectedbythe IC.TheICcentersthe FAB priortotheformationofthebond,transmitsultrasonicpowertotheball,andhelpstocontrolthesizeofthebond.The CD andthe ICAdeterminetheICvolume,whichinturndeterminestheshape,diameterandstrengthofthe1stbond.

Therearetwomainfactorsaffectingthestrengthofthe1stbond:

1.TheforcevectorsappliedbytheICAand Tip face.

2.TheultrasonicvibrationsappliedtotheFAB,whichiscapturedintheICvolume.

TheICAalsoaffectstheforcevectorappliedonthegoldsquash.InmostcasesthelargertheICA,thehigherthepressureappliedonthesquash. 

K&SBondingToolsoffersvariousICAsfordifferentapplicationrequirements,rangingfrom60°to130°.ThemostcommonICAdimensionsare90°and120°.The120°ICAisusuallyappliedtostandardapplicationswherealargersquashispermitted.The120°ICAallowsmoregoldtoflowoutsidetheIC,thusutilizingthetipfaceforastronger1stbond.

InFinePitchapplications,wheresmallersquashesarerequired,enlargedICvolumeisneededtocapturemoregold.Intheseinstances,90°ICAisappropriate.Inthiscase,theICvolumeisofmoreimportancethantheTipfaceasameansoftransmittingtheforceandultrasonicvibrationsneededtostrengthenthe1stbond.

14.TheEffectonLooping

Themaincapillaryparametersaffectingloopingarethe ICtypeandthe Hole.Toensurestablelooping,itiscriticaltoreduceoccurrencesoffrictionbetweenthewireandthecapillary.

Duringlooping,thewirecomesincontactwiththecapillaryalongtheHole,whentouchingthecorneroftheHoleandICandwhengoingthroughthecorneroftheICandthe Tip face.Whenexcessfrictionoccurs,thesecontactscanresultinwiredamageandloopsways. 

ToavoidthesesetbacksinloopingoneneedstodefineanappropriategapbetweentheHoleandthewire,determinethebest ICA,andselectadditionalfeaturessuchas D/IC or IR. 

Theminimumhole-wireclearanceisusuallysetat0.2milforFinePitchapplications;whenfinerclearancesarerequired,thereisdifficultyinreducinggapswithoutdamaginglooping. 

Kulicke&Soffaindustry-leadingtolerancesallowsuchreductionswhilemaintainingastableprocess.

InStandardcapillarydesign,theloopheightdeterminestheCA,whileinFinePitchcapillarydesign,theloopheightdeterminesthe BTNKheight, BTNKangle andBTNKradius. 

Forlongandhighlooping,aD/ICwitha90°or120°angleisusuallyrecommended.Forlongandlowlooping,anIRandICAof120°areadvisable.Naturally,theserecommendationsaresubjecttoapplicationconstraintsandoptimizationconsiderations.

15.TheEffectonthe2ndBond

Thecapillaryaffectsthe2ndbondintwomainaspects:

∙Thestitchbond-thisbondpermanentlyconnectsthewiretothelead.(Moreaboutthestitchbond)

∙Thetailbond-thisbondtemporarilyconnectsthewiretothelead.Itenablesthecapillarytorisetothetailposition,t

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