PECVD操作手册中英文版Word版128p.docx
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PECVD操作手册中英文版Word版128p
操作手册
SINAL–系统
氮化硅沉积系统(人工装载)
制造商:
Roth&RauAG
Gewerbering3
D-09337Hohenstein-Ernstthal,OTWuestenbrand
Germany
1引言...........................................................................................................4
1.1应用和使用……..............................................................................................4
1.2硬件和软件的识别………………..................................................................4
1.2.1硬件…..................................................................................................................4
1.2.2软件…..................................................................................................................7
1.3主要元件的安装介绍…………………………..............................................7
2一般的操作说明………….........................................................................8
2.1射频按钮..........................................................................................................8
2.2按钮..................................................................................................................8
2.3清单.................................................................................................................8
2.4检验盒..............................................................................................................9
2.5输入和输出框架……….....................................................................................9
2.6Tooltip..............................................................................................................93开/关控制系统..........................................................................................10
3.1打开................................................................................................................10
3.2关闭................................................................................................................10
4功能描述和操作……………………................................................................11
4.1标题................................................................................................................12
4.2信息线............................................................................................................12
4.3动态菜单........................................................................................................13
4.4静态菜单........................................................................................................13
4.5图象区域........................................................................................................14
5标准功能……….......................................................................................16
5.1系统................................................................................................................16
5.2工艺参数…….................................................................................................19
5.3气体系统........................................................................................................23
5.4参数................................................................................................................26
5.4.1系统参数...........................................................................................................26
5.4.2工艺参数...........................................................................................................30
5.4.3气体参数...........................................................................................................33
5.5配方................................................................................................................35
5.6趋向................................................................................................................39
5.7协议................................................................................................................42
5.8上升率测试…................................................................................................43
5.9外盖控制…....................................................................................................44
5.10控制..............................................................................................................44
5.11泵..................................................................................................................46
5.12人工传输……..............................................................................................48
6维护...........................................................................................................50
6.1测试点………................................................................................................50
6.1.1主要分布............................................................................................................51
6.1.2机械节点A2.......................................................................................................54
6.1.3机械节点A3.......................................................................................................56
6.1.4等离子源............................................................................................................58
6.1.5传输系统............................................................................................................59
6.1.6气体系统............................................................................................................61
6.2登录和退出…................................................................................................62
6.3用户管理………............................................................................................63
6.4诊断(只针对有权限人员)...........................................................................64
7信息列表...................................................................................................65
8故障检修...................................................................................................67
1Introduction引言
1.1Applicationanduse应用和使用
‘SiNALsystem’isacontrolsystemforsurfacecoatingsystems.Itworksasacontinuousflowcontrollerwith5processchambers.Thefollowinglistshowsitsfunctionalityataglance:
‘SiNAL系统’是一种表面镀膜控制系统。
有5个工艺腔室,连续流动控制的工作方式。
以下是它的功能列表:
●Fullgraphicalrepresentationofthesystemlayoutandthecurrentprocesssequenceaswellasdisplayofallaggregateconditionsandprocessstatusconditions.全部图像表示系统布局、当前工艺次序、并显示所有总体状况和工艺状态。
●Fullgraphicaltrendfunctionsforpresentvaluesasaprocess-relatedtrend.针对工艺相关趋势的当前数值,系统具有全部的图像趋向功能。
●Charge-baseddatarecording基于装料的数据记录。
●Operationinthefollowingmodes:
运行于以下模式:
Processmodeforautomaticoperationwithfullrecipemanagement,onlineparametersettingsandprotocolfunction工艺模式:
自动操作,带有全部配方管理,在线参数设定和协议功能。
Servicemodeforsupportingsystemstartup,troubleshooting,systemandcontrollerconfigurationusingmachineparameters维护模式:
支持系统启动,故障诊断,使用机器参数进行系统和控制器布局。
1.2Identificationofhard-andsoftware硬件和软件的识别
1.2.1Hardware硬件
ThecontrolsoftwarefortheSiNALsystemisinstalledonanindustrialPC(IntelCeleron2.66GHz,256MBRAM,80GBSeagateHDD,3.5“FD,LGDVDCDROM,AOpengraphicscard,networkinterfacecardonboard,Windows2000English+ServicePack4).ThisPCincludesa15"TFTcolormonitoranda19"keyboardwithtouchpad.SiNAL系统的控制软件安装在PC机上(Intel赛扬2.66GHz,256MBRAM,80GB希捷硬盘,3.5寸软驱,LGDVDCDROM,图形卡,网卡,Windows2000English+ServicePack4),15寸TFT液晶显示器,19寸键盘,触摸垫板。
ThecontrolsoftwarehasaccesstothreelocalperipheralunitsofthetypeET200MbyaSI-NECL2controller,CP5613(ProfibusDP),integratedinthePC.TheyareextendedbyI/O-componentsaccordingtotheprocesschannelstoberecorded.Severaldevices(likeEu-rothermheaters,valveblocks,massflowcontrollersandservomotors)aredirectconnectedtotheProfibus.Thisallowsafastdirectaccesstoamassofparametersofeachdevice.ThePC,asmaster,isconnectedtoaTwistedPairline.控制软件通过一个SI-NEC控制器和三个局部外围单元(ET200M类型)连接。
CP5613(ProfibusDP)集成在PC机上,根据工艺通道的记录,扩充I/O零件。
几个装置(Eu-rotherm加热器,阀组,质量流量计,伺候电动机)直接连接于Profibus。
这允许快速直接访问每个装置的参数组。
PC机作为主机,连接于一个双绞线。
TheplasmasourcesaredriventhroughaCANbusplug-incard(PCI331)inthePC.等离子源通过一个CAN总线插入式卡(PCI331)驱动。
DistributionofprofibusaddressesProfibus地址的分布
模块/节点
Profibus地址
PC
1
电源分配节点(ET200M)
3
机器节点A2(ET200M)
4
机器节点A3(ET200M)
5
Eurotherm2408频率转换器(工艺腔室)
12
Eurotherm2400加热器(装载lock)
14
Eurotherm2400加热器(加热腔室)
15
Eurotherm2400加热器(工艺腔室)
16
阀组1+2(FestoCPVDIO1)
18+19
MFC1-3(MKS1179As)
21-23
Lenze马达1(装载腔室r)
41
Lenze马达2(加热腔室)
42
Lenze马达3(工艺腔室)
43
Lenze马达4(工艺腔室r)
44
Lenze马达5(冷却腔室)
45
Lenze马达6(冷却腔室)
46
Lenze马达7(卸载腔室)
47
Lenze马达11(卸载台)
51
Lenze马达24(装载台)
64
预处理源(RF-发生器)
66
DistributionofCAN-Bus-NodeID’sCAN-Bus-NodeID’s的分布
模块/节点
信息ID
信息返回ID
微波1
11
91
微波2
12
92
微波3
13
93
微波4
14
94
微波5
15
95
微波6
16
96
微波7
17
97
微波8
18
98
DecentralizedperipheralET200M分散的外围设备ET200M
Peripheralnode1(PowerdistributionNode)外围节点1(电源分配节点)
Designation名称
单元个数
分散的外围系统ET200M(IM153)
1
S7-300数字输入SM321,potentialsseparated,16DI
3
S7-300数字输出SM322,16DO
2
S7-300模拟输入SM331,potentialsseparated,8AI
2
S7-300信号模块的前端插头
7
Peripheralnode2(MachineNodeA2)外围节点2(机器节点A2)
Designation名称
Numberofunits
分散的外围系统ET200M(IM153)
1
S7-300数字输入SM321,potentialsseparated,16DI
5
S7-300数字输出SM322,16DO
2
S7-300信号模块的前端插头
7
Peripheralnode2(MachineNodeA3)外围节点2(机器节点A3)
Designation名称
Numberofunits
分散的外围系统ET200M(IM153)
1
S7-300数字输入SM321,potentialsseparated,16DI
3
S7-300数字输出SM322,16DO
1
S7-300模拟输入SM331,potentialsseparated,8AI
1
S7-300信号模块的前端插头