TS6700测试仪资料.docx
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TS6700测试仪资料
TableofContents
CHAPTER1SystemStructure
1.1HardwareConfiguration………………………………………………………3
1.2FeaturesoftheTestSystem……………………………………………….3
1.3MainframeandTestHead…………………………………………………….4
1.4DCMeasurementFunctions…………………………………………………..7
CHAPTER2LoadBoardStructure
2.1PerformanceBoardType……………………………………………………..9
2.2LoadBoardOverview………………………………………………………….9
2.3PinLocation………………………………………………………………….10
2.4LoadBoardLayout……………………………………………………………13
LCDpin,I/Opin,DCpin,UVIpin,HCLKpin
2.5PinAssignmentTable……………………………………………………….17
CHAPTER3SystemFileStructure
3.1SoftwareSystem………………………………………………………………22
3.2DevelopmentandOperatingEnvironment…………………………………23
3.3IntegratedEnvironment…………………………………………………….24
3.4DirectoryStructureofEWS……………………………………………….25
3.5DirectoryStructure(IntegratedEnvironment)……………………….26
3.6FileManagementforTestProgram……………………………………….27
3.7SoftwareProgramArchitecture……………………………………………31
MainProgram,TestFlow,Segment,SampleProgram
CHAPTER4TestResultInspection
4.1DataLog……………………………………………………………………….35
4.2LotSummary……………………………………………………………………36
4.3TestResult…………………………………………………………………..39
4.4Statisticaldata…………………………………………………………….42
4.5WaferSummary…………………………………………………………………45
4.6WaferMap………………………………………………………………………48
4.7DialogBox…………………………………………………………………….51
CHAPTER5CommandReference
5.1DatasetCommands.………………………………………………………….52
5.2SystemManagementCommands………………………………………………52
5.3Pattern/FailDisplayCommands…………………………………………..52
5.4ProgramControlCommands…………………………………………………53
5.5DebuggingCommands…………………………………………………………53
CHAPTER6PatternTool
6.1Howtousethepatterntool(Ver2.2x)……………………………….54
6.2Howtousethepatterntool(Classic)…………………………………56
6.3Howtogetthefailpatterntodatalogfile…………………………57
CHAPTER7ShmooTool
7.1Howtouseshmootool………………………………………………………58
CHAPTER8ModuleMonitor
8.1Howtousethemodulemonitor……………………………………………61
Chapter1SystemStructure
1.1HardwareConfiguration
ThissectionexplainsthehardwareconfigurationoftheTS6700testsystem.
BasicSystemConfiguration
ThebasicconfigurationoftheTS6700testsystemwithonetestheadisshownbelow.Thetestsystemconsistsofthemainframe,testhead,testheadpowerframe,andeithertheWOTorOCTformass-productionoperations.Ifthetestsystemistobeusedfordevelopmentpurposes,anEWSwillberequired.Eachcomponentunitofthetestsystemcontainsdifferenthardwareasshownintherightblockdiagram.
1.2FeaturesoftheTestSystem
ThissectionexplainsmainfeaturesoftheTS6700testsystem.
DigitalPin(I/OPin)
TS6700employsaper-pinarchitecture,whichprovidesatiminggeneratorandDCmeasurementunitoneverydigitalpin(I/Opin).Thisimprovesflexibilityintestplanningandreducespro-gramdevelopmenttimedrastically.
LCDPin
AcomparatorisprovidedoneveryLCDpin,resultingindrasticreductionoffunctionaltest’stime,comparedtoconventionalcomparatorswitchingtypetestsystems.Inaddition,useofanactiveloadonLCDpinscanalsoreducetesttimeforopen-/short-circuittestsandresistancemeasurementperformedfordeviceshavingmanypins.
InthecaseofTFTdrivers,high-accuracysingle-rangemeasurementscanbeperformedfordeviceswithuptomediumvoltagelevel.
Thetestsystemcanaccommodateupto736LCDpins,allowingthetestsystemtobeusedforfutureLCDdrivershavingalargepincount.
Multi-DUTMeasurement
TS6700allowsuptotwodevicestobemeasuredsimultaneouslypertesthead.
Frequency/TimeMeasurement
Thisfunctionallowsmeasurementofthefrequencyofanydigitalpinandmeasurementoftimedifferencebetweenanydigitalpins.Withthereciprocaltypecounter,high-accuracymeasurementispossibleirrespectiveofthefrequency.Forfrequencymeasurement,ahysteresisforthethresholdvoltagecanbeset.LPF(100kHz)canalsobeselected.
1.3Mainframe,TestHead
ThissectionexplainsthemainframeandtestheadofTS6700system.
A.Mainframe
QTCnest(testercontroller)
AccommodatesCPUcards,harddiskunit,modulecontrollerandinterfacecards.
PGnest
Accommodatesapatterngenerator,rategenerator,failmemorycontrollerandtriggercards.
PMnest
Accommodatespatternmemorycards(onepatternmemorycardper16pins).Italsoaccommodatesinterfacecardsandserialpatternmemorycards
PMUnest
Accommodatesamaximumof16VImodules(maximumvoltage:
±32V,maximumcurrent:
±31mA).VImodulesincludePMU,LCDPMUandRVI.
UVInest
Accommodatesamaximumof4universalVImodules(maximumvoltage:
±128V,maximumcurrent:
±1A).
MSnest
Accommodatesclockgenerator,waveformgenerator,waveformdigitizer,digitalsignalprocessorandothercards.
UPS
AnUninterruptedPowerSupplyisprovidedattherearsideofthemainframetobackupthetestercontrollerincaseofpowerfailure.
Systempower
Accommodatespowersuppliesrequiredforthetestsystem.
B.TestHead
Pinelectronicscardsection
Eachpinelectronicscardaccommodates8pins,andupto14pinelectronicscards(i.e.,112pins)canbeinstalledinatesthead.Theycanbeinstalledincardslots1to7and17to23(cardslots8to16arenotprovided).Therefore,pins1to56and129to184canbeprovided(pins57to128arenotprovided).Relationshipbetweenpinelectroniccard#andpin#isshownbelow.
HCLKcardsection
EachHCLKcardaccommodates2pins,andupto2HCLKcards(i.e.,4pins)canbeinstalledinatesthead.Intestprograms,HCLKpinsaretreatedasPINmodules.Thus,pin#57,58,185and186areassignedtotheHCLKpins.RelationshipbetweenHCLKcard#andpin#isshownbelow.
Mininest
Thefollowingcardsareinstalledinthemininest.
1.ITFMcard:
Interfacesthetestercontrollerwithtestheads.ThiscardcanaccommodateanSTM(fortimemeasurement).
2.LCDIFMcard:
ControlsLCDcards.
3.LCDCKMcard:
SuppliesthesystemclocktoPEcardsandLCDcards.
4.LCDIFAcard:
ReceivessignalsfromLCDcardsandoutputsthemthroughamultiplexertotheMSnest.ItalsosuppliestheoffsetvoltagetotherangingsectionofLCDcards.
LCDcardsection
EachLCDcardaccommodates16pins,andupto46LCDcards(i.e.,736pins)canbeinstalledinatesthead.TheycanbeinstalledinLCDcardslots1to23and25to47(LCDcardslot24isnotprovided).Therefore,pins1to368and385to752canbeprovided(pins369to384arenotprovided).
RelationshipbetweenLCDcard#andpin#isshownright.
IDDQcardsection
EachIDDQcardaccommodates2pins,andupto2IDDQcards(i.e.,4pins)canbeinstalledin
atesthead.RelationshipbetweenIDDQcard#andpin#isshownbelow.
IfnoIDDQcardsareinstalled,aPFcardwillbeinstalledinsteadtomonitornestpower.
DCcardsection
EachDCcardaccommodates12pins,andupto2DCcards(i.e.,24pins)canbeinstalledinatesthead.RelationshipbetweenDCcard#andpin#isshownbelow.
Switchbox
TheswitchboxhasswitchesandanindicatingLEDinthefollowingfunctions:
aswitchusedtofixaperformanceboardtothetesthead,aswitchusedtoreleasetheperformanceboard,aswitchusedtoturnSApowerON/OFF,andanLEDusedtoindicatethatpoweriscurrentlysuppliedtothetesthead.Thepositionoftheswitchboxcanbechangedaccordingtohowit'sused(e.g.,wafertest,finaltest).
1.4DCMeasurementFunctions
A.UVI(UniversalVI)Module
UVImodulesareprovidedasdevicepowersupplies,andcanalsobeconnectedviatheDCmatrixlinetoperformDCparametricmeasurementsthatexceedcurrentrangesofPMU,LCDPMU,andRVI.Inaddition,UVImodulesprovideafunctionofIDDQtest.OutputsoftheUVImodulesareconnectedtoIDDQcardsasshowninthetable.Theoutputvoltagerangeisfrom+128Vto-128V.Theoutputcurrentrangesare30uA,300uA,3mA,30mA,60mA,250mA,1A.WhenconnectedviatheDCmatrixline,themaximumoutputvoltage/currentwillbelimitedto64V/250mA.
B.I/OPinSharedPMU
PMUmodulesareprovidedforDCparametricmeasurementsthatexceedvoltage/current
rangesofSVI.AspecificchannelisassignedtoeachI/Opinasshowninthetablebelow.Theoutputvoltagerangeisfrom+15Vto–15V.Theoutputcurrentrangesare3uA,30uA,300uA,3mA,and30mA.
C.LCDPMU
LCDPMUmodulesareprovidedforDCparametricmeasurementsofLCDpins.AspecificchannelisassignedtoeachLCDpinasshowninthetablebelow.Theoutputvoltagerangeisfrom+32Vto–32V.Theoutputcurrentrangeare3uA,30uA,300uA,3mA,and30mA.
D.I/OPer-PinDC(SVI)
Thisfunctionisprovidedper-pinonthepinelectronicscard,andismainlyusedformeasurementofdeviceinputleakcurrentandshort-circuitcontacttest.VFIMandIFVMmeasurementscanbeperformed.Theoutputvoltagerangeisfrom+8Vto-2.5V.Theoutputcurrentrangesare10uAand250uA.
E.RVI
RVImodulesareprovidedtosupplythereferencepowertotheLCDdrivers,andupto24channelscanbeinstalled.Theoutputvoltagerangeisfrom+32Vto–32V.Theoutputcurrentrangesare3uA,30uA,300uA,3mA,and30mA.
F.DCMeasurementBlockDiagram
Chapter2LoadboardStructure
2.1PerformanceBoardType
A.PerformanceboardcompatiblewithTS6700seriesprobecards
(PFB-AorPFB-D)
ProbecardsdevelopedforTS700canbeusedwithTS6700withoutanymodifications.
LCDpins:
512(max.),I/Opins:
62(max.)
B.Full-pinperformanceboard(PFB-B)
ThisboardsupportsfullpinconfigurationofTS6700.
LCDpins:
480(max.),I/Opins:
64(max.)
C.Full-pinperformanceboard(PFB-C)
ThisboardsupportsfullpinconfigurationofTS6700