Air Liquide Specs for ss tubing.docx

1、Air Liquide Specs for ss tubingGases and Equipment Groupworldwide FABRICATION AND ERECTION SPECIFICATIONElectronic-Grade Stainless Steel Tubing SystemsJanuary 1999Page 1 of 26RESPONSIBLE GROUP: Electronics Engineering *Formerly EES002 EES003Complete Revision EES006 EES007 EES008 EES020 EES022Table o

2、f ContentsDOUBLE CLICK ON GREEN NUMBER TO GO TO THAT SECTIONSectionTitlePagePurpose2Scope2Related Documents2Contractor Requirements2Facility Requirements3Utility System Requirements4Materials Requirements4Construction Requirements6Testing Requirements11Labeling Requirements16Packaging/Commissioning

3、Requirements16Documentation Requirements17Weld Log19Weld Coupon Log20Weld Coupon Evaluation Sheet21Material and Equipment Recommendations 22Maximum Detected Leak Rate Versus Test Time24Welder Qualification Requirements25DOUBLE CLICK ON GREEN TOC TO RETURN TO TABLE OF CONTENTS1. PURPOSE 1.1 This fabr

4、ication and erection specification defines a general set of fabrication and erection requirements for electronic-grade stainless steel tubing systems.2. SCOPE 2.1 This specification applies to the fabrication and erection of all-welded, electronic-grade, stainless steel tubing systems installed in s

5、emiconductor fabrication facilities. Tubing systems are defined as assemblies of tube, fittings, and other components fitted with tube extensions or face seal connections.2.2 This specification applies to the following: Shop and on-site fabrication of tubing subsystems and manifolds Final erection o

6、f tubing systems within the semiconductor fabrication facility2.3 This specification complies with SEMI E49.6.3. RELATED DOCUMENTS 3.1 American Society of Mechanical Engineers (ASME) B31.3 Process Piping Boiler and Pressure Vessel Code (BPVC) Section IX Welding and Brazing Procedures3.2 Department o

7、f Defense (DOD) FED-STD-209E Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones3.3 Semiconductor Equipment and Materials International (SEMI) E49.6 Guide for Subsystem Assembly and Testing Procedures - Stainless Steel Systems 2796A Guidelines For Ultrapure Water Used In Semicondu

8、ctor Processing4. CONTRACTOR REQUIREMENTS 4.1 Deviations: Once the contractor agrees on the requirements of this specification, no deviations shall be made without prior written agreement between Air Products and the contractor.4.2 Quality control representative (QCR): A person employed by the contr

9、actor shall function as the QCR (quality control representative). For on-site fabrication, the QCR shall be the point of contact to, and be approved by, Air Products and the Owner. The QCR minimum qualifications shall be: not color blind; trained for orbital welding; trained for installation of comp

10、ression fittings, face seal fittings, and high purity tubing assemblies; and fully familiar with this specification. The QCR shall be responsible for: welder training; weld coupon inspection; tubing system testing; and implementation and standardization of all procedures required to meet this specif

11、ication.4.3 Approvals and Authorizations: All required approvals and authorizations shall be obtained from Air Products in writing.5. FACILITY REQUIREMENTS 5.1 General: Inspection, cleaning, welding, and assembly of subsystems and manifolds shall be performed in a cleanroom or a clean zone (both are

12、 hereafter referred to as a cleanroom) which is certified per FED-STD-209E. The cleanroom shall be physically separated from other fabrication areas by walls and doors. The access to the cleanroom shall be limited to persons actually involved in the fabrication of tubing systems.5.2 Cleanroom Specif

13、ications5.2.1 Cleanroom air shall be recirculated at multiple air changes per hour through HEPA (High Efficiency Particulate Air) filters or ULPA (Ultra Low Particulate Air) filters to reduce the total number of airborne particles to the levels listed below. The cleanroom shall be certified per FED-

14、STD-209E prior to the beginning of use and every four (4) months thereafter. Particle counts shall be monitored and recorded bi-weekly. Documentation shall be available onsite at all times. Class 100 for workstations in Welding and Cleaning Area Class 1,000 for Material Prep/Cutting and Welding and

15、Cleaning Areas Class 10,000 for Gowning Area5.2.2 Air pressure inside the cleanroom shall be 0.17 to 0.22 mbar (0.07 to 0.09 in-water-column) greater than the surrounding area. Air pressure shall be monitored daily. Documentation shall be available onsite at all times.5.2.3 Temperature and humidity

16、inside the cleanroom shall be 20 1C (70 2F) and 50% RH (relative humidity).5.2.4 Air handler operation shall be continuous, 24 hours per day, seven days per week. Prefiltered makeup air to the cleanroom shall be introduced through either a separate unit (used to balance exhaust and set the humidity

17、level) or a recirculation air unit.5.2.5 Exhaust ventilation shall be 1 cubic meter per minute per square meter of floor area (1 cubic foot per minute per square foot of floor area).5.3 Area Requirements: The cleanroom shall be divided into at least three areas as follows.5.3.1 Gowning Area (Class 1

18、0,000): This area shall be used for the donning of cleanroom apparel and shall also serve as the entrance into the Material Prep/Cutting Area. (This area may be a curtained-off area within the Material Prep/Cutting Area.)5.3.2 Material Prep/Cutting Area (Class 1000): This area shall be used for mate

19、rial inspection and storage, and tube cutting and facing. A minimum of 40 percent of the ceiling area shall be covered by HEPA or ULPA filters. A minimum of 9.1 to 12.2 m/min (30 to 45 fpm) downflow velocity is required.5.3.3 Welding and Cleaning Area (Class 100): This area shall be used for welding

20、 and cleaning. This area shall be isolated from the preparation area by self-closing swing doors and pass-through windows. At a minimum, this area shall be isolated with floor-to-ceiling hard or soft walls, have separate return air grilles, and be positively pressurized to a minimum of 1.3 mm (0.05

21、in) water-column (W.C.) greater than the Material Prep/Cutting Area. 100 percent of the ceiling area over workstations shall be covered by HEPA or ULPA filters at Class 100. A minimum of 22.9 m/min (75 fpm) downflow velocity is required.6. UTILITY SYSTEM REQUIREMENTS 6.1 Drying Gas: Nitrogen used fo

22、r drying after cleaning shall have the following purity levels: Filtration: 0.01 m rated Oxygen Content: 3 ppm molar Moisture Content: 3.5 ppm molar Total Hydrocarbon Content: 2.0 ppm molar6.2 Purge Gases: Argon or nitrogen used for purging gas systems during fabrication and for testing shall be sup

23、plied from a cryogenic source and shall have the following purity levels at the point of use. Filtration: 0.01 m rated Oxygen Content: 50 ppb molar Moisture Content: 50 ppb molar Total Hydrocarbon Content: 50 ppb molar6.3 Weld Gas: Argon used for weld purging shall be supplied from a cryogenic sourc

24、e and shall have the following purity levels at the point of use: Filtration: 0.01 m rated Oxygen Content: 50 ppb molar CO Content: 50 ppb molar CO2 Content: 50 ppb molar Moisture Content: 50 ppb molar Total Hydrocarbon Content: 0.5 micron rangeBacteria 1 colony/100 millimeterSilica - total 3 ppb mo

25、larSilica - dissolved 1 ppb molarIons 1 ppb molar totalMetals 1 ppb molar total7. MATERIALS REQUIREMENTS H7.1 General: The contractor shall have full responsibility for all tubing system component materials, including material furnished by others, until the material is installed and the tubing syste

26、m is completed and commissioned. The contractor shall receive, off-load, inspect, and store all tubing system components as they arrive on site.7.2 Receiving: Receiving of material shall be as outlined in the following:7.2.1 Upon contractors receipt of material, log each piece into a Receiving Inven

27、tory. Receiving Inventory log shall be subject to Air Products review throughout the job.7.2.2 After logging, place each piece inside a secure storage area to await incoming inspection. All material awaiting inspection shall be kept separate from the inspected material and the area shall be labeled

28、Material Not Inspected.7.2.3 Verify that the appropriate documentation has accompanied the material shipment per the requirements of the component material purchase specification, and file documentation with the receiving inventory.7.3 Inspection: Incoming inspection by contractor at job site shall

29、be as outlined in the following paragraphs: Note: Major orders of tubing system components shall be source inspected at component supplier site by Air Products. Incoming inspection by contractor at job site is limited to verification that no damage has occurred during shipment. Exception: If a sourc

30、e inspection is not performed by Air Products, Air Products may notify contractor that a detailed inspection is required. In this case, Air Products shall provide the inspection criteria that is to be used for incoming inspection of the components by the contractor.7.3.1 All tubing system components shall be inspected within 48 hours of receipt and prior to installation. Contractor shall