Air Liquide Specs for ss tubing.docx

Air Liquide Specs for ss tubing.docx

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AirLiquideSpecsforsstubing

GasesandEquipmentGroup

worldwideFABRICATIONANDERECTIONSPECIFICATION

Electronic-GradeStainlessSteelTubingSystems

January1999

Page1of26

RESPONSIBLEGROUP:

ElectronicsEngineering*FormerlyEES002

EES003

CompleteRevisionEES006

EES007

EES008

EES020

EES022

TableofContents

DOUBLECLICKONGREENNUMBERTOGOTOTHATSECTION

Section

Title

Page

Purpose

2

Scope

2

RelatedDocuments

2

ContractorRequirements

2

FacilityRequirements

3

UtilitySystemRequirements

4

MaterialsRequirements

4

ConstructionRequirements

6

TestingRequirements

11

LabelingRequirements

16

Packaging/CommissioningRequirements

16

DocumentationRequirements

17

WeldLog

19

WeldCouponLog

20

WeldCouponEvaluationSheet

21

MaterialandEquipmentRecommendations

22

MaximumDetectedLeakRateVersusTestTime

24

WelderQualificationRequirements

25

DOUBLECLICKONGREEN"TOC"TORETURNTOTABLEOFCONTENTS

1.PURPOSE

1.1Thisfabricationanderectionspecificationdefinesageneralsetoffabricationanderectionrequirementsforelectronic-gradestainlesssteeltubingsystems.

2.SCOPE

2.1Thisspecificationappliestothefabricationanderectionofall-welded,electronic-grade,stainlesssteeltubingsystemsinstalledinsemiconductorfabricationfacilities.Tubingsystemsaredefinedasassembliesoftube,fittings,andothercomponentsfittedwithtubeextensionsorfacesealconnections.

2.2Thisspecificationappliestothefollowing:

∙Shopandon-sitefabricationoftubingsubsystemsandmanifolds

∙Finalerectionoftubingsystemswithinthesemiconductorfabricationfacility

2.3ThisspecificationcomplieswithSEMIE49.6.

3.RELATEDDOCUMENTS

3.1AmericanSocietyofMechanicalEngineers（ASME）

B31.3ProcessPiping

BoilerandPressureVesselCode（BPVC）SectionIXWeldingandBrazingProcedures

3.2DepartmentofDefense（DOD）

FED-STD-209EAirborneParticulateCleanlinessClassesinCleanroomsandCleanZones

3.3SemiconductorEquipmentandMaterialsInternational（SEMI）

E49.6GuideforSubsystemAssemblyandTestingProcedures-StainlessSteelSystems

2796AGuidelinesForUltrapureWaterUsedInSemiconductorProcessing

4.CONTRACTORREQUIREMENTS

4.1Deviations:

Oncethecontractoragreesontherequirementsofthisspecification,nodeviationsshallbemadewithoutpriorwrittenagreementbetweenAirProductsandthecontractor.

4.2Qualitycontrolrepresentative（QCR）:

ApersonemployedbythecontractorshallfunctionastheQCR（qualitycontrolrepresentative）.Foron-sitefabrication,theQCRshallbethepointofcontactto,andbeapprovedby,AirProductsandtheOwner.TheQCRminimumqualificationsshallbe:

notcolorblind;trainedfororbitalwelding;trainedforinstallationofcompressionfittings,facesealfittings,andhighpuritytubingassemblies;andfullyfamiliarwiththisspecification.TheQCRshallberesponsiblefor:

weldertraining;weldcouponinspection;tubingsystemtesting;andimplementationandstandardizationofallproceduresrequiredtomeetthisspecification.

4.3ApprovalsandAuthorizations:

AllrequiredapprovalsandauthorizationsshallbeobtainedfromAirProductsinwriting.

5.FACILITYREQUIREMENTS

5.1General:

Inspection,cleaning,welding,andassemblyofsubsystemsandmanifoldsshallbeperformedinacleanroomoracleanzone（botharehereafterreferredtoasacleanroom）whichiscertifiedperFED-STD-209E.Thecleanroomshallbephysicallyseparatedfromotherfabricationareasbywallsanddoors.Theaccesstothecleanroomshallbelimitedtopersonsactuallyinvolvedinthefabricationoftubingsystems.

5.2CleanroomSpecifications

5.2.1CleanroomairshallberecirculatedatmultipleairchangesperhourthroughHEPA（HighEfficiencyParticulateAir）filtersorULPA（UltraLowParticulateAir）filterstoreducethetotalnumberofairborneparticlestothelevelslistedbelow.ThecleanroomshallbecertifiedperFED-STD-209Epriortothebeginningofuseandeveryfour（4）monthsthereafter.Particlecountsshallbemonitoredandrecordedbi-weekly.Documentationshallbeavailableonsiteatalltimes.

∙Class100forworkstationsinWeldingandCleaningArea

∙Class1,000forMaterialPrep/CuttingandWeldingandCleaningAreas

∙Class10,000forGowningArea

5.2.2Airpressureinsidethecleanroomshallbe0.17to0.22mbar（0.07to0.09in-water-column）greaterthanthesurroundingarea.Airpressureshallbemonitoreddaily.Documentationshallbeavailableonsiteatalltimes.

5.2.3Temperatureandhumidityinsidethecleanroomshallbe20°1°C（702F）and50%RH（relativehumidity）.

5.2.4Airhandleroperationshallbecontinuous,24hoursperday,sevendaysperweek.Prefilteredmakeupairtothecleanroomshallbeintroducedthrougheitheraseparateunit（usedtobalanceexhaustandsetthehumiditylevel）orarecirculationairunit.

5.2.5Exhaustventilationshallbe1cubicmeterperminutepersquaremeteroffloorarea（1cubicfootperminutepersquarefootoffloorarea）.

5.3AreaRequirements:

Thecleanroomshallbedividedintoatleastthreeareasasfollows.

5.3.1GowningArea（Class10,000）:

ThisareashallbeusedforthedonningofcleanroomapparelandshallalsoserveastheentranceintotheMaterialPrep/CuttingArea.（Thisareamaybeacurtained-offareawithintheMaterialPrep/CuttingArea.）

5.3.2MaterialPrep/CuttingArea（Class1000）:

Thisareashallbeusedformaterialinspectionandstorage,andtubecuttingandfacing.Aminimumof40percentoftheceilingareashallbecoveredbyHEPAorULPAfilters.Aminimumof9.1to12.2m/min（30to45fpm）downflowvelocityisrequired.

5.3.3WeldingandCleaningArea（Class100）:

Thisareashallbeusedforweldingandcleaning.Thisareashallbeisolatedfromthepreparationareabyself-closingswingdoorsandpass-throughwindows.Ataminimum,thisareashallbeisolatedwithfloor-to-ceilinghardorsoftwalls,haveseparatereturnairgrilles,andbepositivelypressurizedtoaminimumof1.3mm（0.05in）water-column（W.C.）greaterthantheMaterialPrep/CuttingArea.100percentoftheceilingareaoverworkstationsshallbecoveredbyHEPAorULPAfiltersatClass100.Aminimumof22.9m/min（75fpm）downflowvelocityisrequired.

6.UTILITYSYSTEMREQUIREMENTS

6.1DryingGas:

Nitrogenusedfordryingaftercleaningshallhavethefollowingpuritylevels:

∙Filtration:

0.01µmrated

∙OxygenContent:

<3ppmmolar

∙MoistureContent:

<3.5ppmmolar

∙TotalHydrocarbonContent:

<2.0ppmmolar

6.2PurgeGases:

Argonornitrogenusedforpurginggassystemsduringfabricationandfortestingshallbesuppliedfromacryogenicsourceandshallhavethefollowingpuritylevelsatthepointofuse.

∙Filtration:

0.01µmrated

∙OxygenContent:

<50ppbmolar

∙MoistureContent:

<50ppbmolar

∙TotalHydrocarbonContent:

<50ppbmolar

6.3WeldGas:

Argonusedforweldpurgingshallbesuppliedfromacryogenicsourceandshallhavethefollowingpuritylevelsatthepointofuse:

∙Filtration:

0.01µmrated

∙OxygenContent:

<50ppbmolar

∙COContent:

<50ppbmolar

∙CO2Content:

<50ppbmolar

∙MoistureContent:

<50ppbmolar

∙TotalHydrocarbonContent:

<50ppbmolar

6.4DeionizedWater:

DeionizedwaterusedforcleaningshallhavethefollowingpuritylevelsperSEMIDocument2796A.

Resistivityon-line

18.2megaohm-centimeters@25°C（77°F）

TOC（TotalOxidizableCarbon）

5ppbmolar

DissolvedOxygen

1ppbmolar

On-lineParticlesperliter

500inthe0.05–0.1micronrange

300inthe0.1–0.2micronrange

50inthe0.2–0.3micronrange

20inthe0.3–0.5micronrange

4inthe>0.5micronrange

Bacteria

1colony/100millimeter

Silica-total

3ppbmolar

Silica-dissolved

1ppbmolar

Ions

1ppbmolartotal

Metals

1ppbmolartotal

7.MATERIALSREQUIREMENTS

H

7.1General:

Thecontractorshallhavefullresponsibilityforalltubingsystemcomponentmaterials,includingmaterialfurnishedbyothers,untilthematerialisinstalledandthetubingsystemiscompletedandcommissioned.Thecontractorshallreceive,off-load,inspect,andstorealltubingsystemcomponentsastheyarriveonsite.

7.2Receiving:

Receivingofmaterialshallbeasoutlinedinthefollowing:

7.2.1Uponcontractor'sreceiptofmaterial,logeachpieceintoaReceivingInventory.ReceivingInventorylogshallbesubjecttoAirProductsreviewthroughoutthejob.

7.2.2Afterlogging,placeeachpieceinsideasecurestorageareatoawaitincominginspection.Allmaterialawaitinginspectionshallbekeptseparatefromtheinspectedmaterialandtheareashallbelabeled"MaterialNotInspected."

7.2.3Verifythattheappropriatedocumentationhasaccompaniedthematerialshipmentpertherequirementsofthecomponentmaterialpurchasespecification,andfiledocumentationwiththereceivinginventory.

7.3Inspection:

Incominginspectionbycontractoratjobsiteshallbeasoutlinedinthefollowingparagraphs:

Note:

MajorordersoftubingsystemcomponentsshallbesourceinspectedatcomponentsuppliersitebyAirProducts.Incominginspectionbycontractoratjobsiteislimitedtoverificationthatnodamagehasoccurredduringshipment.Exception:

IfasourceinspectionisnotperformedbyAirProducts,AirProductsmaynotifycontractorthatadetailedinspectionisrequired.Inthiscase,AirProductsshallprovidetheinspectioncriteriathatistobeusedforincominginspectionofthecomponentsbythecontractor.

7.3.1Alltubingsystemcomponentsshallbeinspectedwithin48hoursofreceiptandpriortoinstallation.Contractorshall