镀膜真空术语全集中英文对照.docx
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镀膜真空术语全集中英文对照
镀膜真空术语全集(中英文对照)
5.分压真空计(分压分析器)
5-1.射频质谱仪radiofrequencymassspectrometer:
5-2.四极质谱仪(四级滤质器)quadrupolemassspectrometer;quadrupolemassfiler:
5-3.单极质谱仪momopolemassspectrometer:
5-4.双聚焦质谱仪doublefocusingmassspectrometer:
5-5.磁偏转质谱仪magneticdeflectionmassspectrometer:
5-6.余摆线聚焦质谱仪trochoidalfocusingmassspectrometer:
5-7.回旋质谱仪omegatronmassspectrometer:
5-8.飞行时间质谱仪timeofflightmassspectrometer:
6.真空计校准
6-1.标准真空计referencegauges:
6-2.校准系统systemofcalibration:
6-3.校准系数Kcalibrationcoefficient:
6-4.压缩计法meleodgaugemethod:
6-5.膨胀法expansionmethod:
6-6.流导法flowmethod:
4. 1.真空系统vacuumsystem
1-1.真空机组pumpsystem:
1-2.有油真空机组pumpsystemusedoil:
1-3.无油真空机组oilfreepumpsystem
1-4.连续处理真空设备continuoustreatmentvacuumplant:
1-5.闸门式真空系统vacuumsystemwithanair-lock:
1-6.压差真空系统differentiallypumpedvacuumsystem:
1-7.进气系统gasadmittancesystem:
2.真空系统特性参量
2-1.抽气装置的抽速volumeflowrateofapumpingunit:
2-2.抽气装置的抽气量throughputofapumpingunit:
2-3.真空系统的放气速率degassing(outgassing)throughputofavacuumsystem:
2-4.真空系统的漏气速率leakthroughputofavacuumsystem:
2-5.真空容器的升压速率rateofpressureriseofavacuumchamber:
2-6.极限压力ultimatepressure:
2-7.残余压力residualpressure:
2-8.残余气体谱residualgasspectrum:
2-9.基础压力basepressure:
2-10.工作压力workingpressure:
2-11.粗抽时间roughingtime:
2-12.抽气时间pump-downtime:
2-13.真空系统时间常数timeconstantofavacuumsystem:
2-14.真空系统进气时间ventingtime:
3.真空容器
3-1.真空容器;真空室vacuumchamber:
3-2.封离真空装置sealedvacuumdevice:
3-3.真空钟罩vacuumbelljar:
3-4.真空容器底板vacuumbaseplate:
3-5.真空岐管vacuummanifold:
3-6.前级真空容器(贮气罐)backingreservoir:
3-7.真空保护层outerchamber:
3-8.真空闸室vacuumairlock:
3-9.真空冷凝器;蒸汽冷凝器deviceforcondensingvapor:
4.真空封接和真空引入线
4-1.永久性真空封接permanentseal:
4.2.玻璃分级过渡封接gradedseal:
4-3.压缩玻璃金属封接***pressionglass-to-metalseal:
4-4.匹配式玻璃金属封接matchedglass-to-metalseal:
4-5.陶瓷金属封接ceramic-to-metalseal:
4-6.半永久性真空封接semi-permanentseal:
4-7.可拆卸的真空封接demountablejoint:
4-8.液体真空封接liquidseal
4-9.熔融金属真空封接moltenmetalseal:
4-10.研磨面搭接封接groundandlappedseal:
4-11.真空法兰连接vacuumflangeconnection:
4-12.真空密封垫vacuum-tightgasket:
4-13.真空密封圈ringgasket:
4-14.真空平密封垫flatgasket:
4-15.真空引入线feedthroughleadthrough:
4-16.真空轴密封shaftseal:
4-17.真空窗vacuumwindow:
4-18.观察窗viewingwindow:
5.真空阀门
5-1.真空阀门的特性characteristicofvacuumvalves:
⑴.真空阀门的流导conductanceofvacuumvalves:
⑵.真空阀门的阀座漏气率leakrateofthevacuumseat:
5-2.真空调节阀regulatingvalve:
5-3.微调阀micro-adjustablevalve:
5-4.充气阀chargevalve:
5-5.进气阀gasadmittancevalve:
5-6.真空截止阀breakvalve:
5-7.前级真空阀backingvalve:
5-8.旁通阀by-passvalve:
5-9.主真空阀mainvacuumvalve:
5-10.低真空阀lowvacuumvalve:
5-11.高真空阀highvacuumvalve:
5-12.超高真空阀;UHV阀ultra-highvacuumvalve:
5-13.手动阀manuallyoperatedvalve:
5-14.气动阀pneumaticallyoperatedvalve:
5-15.电磁阀electromagneticallyoperatedvalve:
5-16.电动阀valvewithelectricallymotorizedoperation:
5-17.挡板阀bafflevalve:
5-18.翻板阀flapvalve:
5-19.插板阀gatevalve:
5-20.蝶阀butterflyvalve:
6.真空管路
6-1.粗抽管路roughingline:
6-2.前级真空管路backingline:
6-3.旁通管路;By-Pass管路by-passline:
6-4.抽气封口接头pumpingstem:
6-5.真空限流件limitingconductance:
6-6.过滤器filter:
5. 1.一般术语
1-1真空镀膜vacuumcoating:
1-2基片substrate:
1-3试验基片testingsubstrate:
1-4镀膜材料coatingmaterial:
1-5蒸发材料evaporationmaterial:
1-6溅射材料sputteringmaterial:
1-7膜层材料(膜层材质)filmmaterial:
1-8蒸发速率evaporationrate:
1-9溅射速率sputteringrate:
1-10沉积速率depositionrate:
1-11镀膜角度coatingangle:
2.工艺
2-1真空蒸膜vacuumevaporationcoating:
(1).同时蒸发simultaneousevaporation:
(2).蒸发场蒸发evaporationfieldevaporation:
(3).反应性真空蒸发reactivevacuumevaporation:
(4).蒸发器中的反应性真空蒸发reactivevacuumevaporationinevaporator:
(5).直接加热的蒸发directheatingevaporation:
(6).感应加热蒸发inducedheatingevaporation:
(7).电子束蒸发electronbeamevaporation:
.激光束蒸发laserbeamevaporation:
(9).间接加热的蒸发indirectheatingevaporation:
(10).闪蒸flashevaportion:
2-2真空溅射vacuumsputtering:
(1).反应性真空溅射reactivevacuumsputtering:
(2).偏压溅射biassputtering:
(3).直流二级溅射directcurrentdiodesputtering:
(4).非对称性交流溅射asymmtricalternatecurrentsputtering:
(5).高频二极溅射highfrequencydiodesputtering:
(6).热阴极直流溅射(三极型溅射)hotcathodedirectcurrentsputtering:
(7).热阴极高频溅射(三极型溅射)hotcathodehighfrequencysputtering:
.离子束溅射ionbeamsputtering:
(9).辉光放电清洗glowdischargecleaning:
2-3物理气相沉积PVDphysicalvapordeposition:
2-4化学气相沉积CVDchemicalvapordeposition:
2-5磁控溅射magnetronsputtering:
2-6等离子体化学气相沉积;PCVDplasmachemistryvapordeposition:
2-7空心阴极离子镀HCDhollowcathodedischargedeposition:
2-8电弧离子镀arcdischargedeposition:
3.专用部件
3-1镀膜室coatingchamber:
3-2蒸发器装置evaporatordevice:
3-3蒸发器evaporator:
3-4直接加热式蒸发器evaporatorbydirectheat:
3-5间接加热式蒸发器evaporatorbyindirectheat:
3-7溅射装置sputteringdevice:
3-8靶target:
3-10时控挡板timingshutter:
3-11掩膜mask:
3-12基片支架substrateholder:
3-13夹紧装置clamp:
3-14换向装置reversingdevice:
3-15基片加热装置substrateheatingdevice:
3-16基片冷却装置substratecoldingdevice:
4.真空镀膜设备
4-1真空镀膜设备vacuumcoatingplant:
(1).真空蒸发镀膜设备vacuumevaporationcoatingplant:
(2).真空溅射镀膜设备vacuumsputteringcoatingplant:
4-2连续镀膜设备continuouscoatingplant:
4-3半连续镀膜设备semi-continuouscoatingplant
6. 1.漏孔
1-1漏孔leaks:
1-2通道漏孔channelleak:
1-3薄膜漏孔membraneleak:
1-4分子漏孔molecularleak:
1-5粘滞漏孔vixcousleak:
1-6校准漏孔calibratedleak:
1-7标准漏孔referenceleak:
1-8虚漏virtualleak:
1-9漏率leakrate:
1-10标准空气漏率standardairleakrate:
1-11等值标准空气漏率equivalentstandardairleakrate:
1-12探索(示漏)气体:
2.本底
2-1本底background:
2-2探索气体本底searchgasbackground:
2-3漂移drift:
2-4噪声noise:
3.检漏仪
3-1检漏仪leakdetector:
3-2高频火花检漏仪H.F.sparkleakdetector:
3-3卤素检漏仪halideleakdetector:
3-4氦质谱检漏仪heliummassspectrometerleakdetector:
3-5检漏仪的最小可检漏率minimumdetectablerateofleakdetector:
4.检漏
4-1气泡检漏leakdetectionbybubbles:
4-2氨检漏leakdetectionbyammonia:
4-3升压检漏leakdetectionofrisepressure:
4-4放射性同位素检漏radioactiveisotopeleakdetection:
4-5荧光检漏fluorescenceleakdetection
7. 1.一般术语
1-1真空干燥vacuumdrying:
1-2冷冻干燥freezedrying:
1-3物料material:
1-4待干燥物料materialtobedried:
1-5干燥物料driedmaterial:
1-6湿气moisture;humidity:
1-7自由湿气freemoisture:
1-8结合湿气boundmoisture:
1-9分湿气partialmoisture:
1-10含湿量moisturecontent:
1-11初始含湿量initialmoisturecontent:
1-12最终含湿量finalresidualmoisture:
1-13湿度degreeofmoisture,degreeofhumidity:
1-14干燥物质drymatter:
1-15干燥物质含量contentofdrymatter:
2.干燥工艺
2-1干燥阶段stagesofdrying:
(1).预干燥preliminarydry:
(2).一次干燥(广义)primarydrying(ingeneral):
(3).一次干燥(冷冻干燥)primarydrying(freeze-drying):
(4).二次干燥secondarydrying:
2-2.
(1).接触干燥contactdrying:
(2).辐射干燥dryingbyradiation:
(3).微波干燥microwavedrying:
(4).气相干燥vaporphasedrying:
(5).静态干燥staticdrying:
(6).动态干燥dynamicdrying:
2-3干燥时间dryingtime:
2-4停留时间lengthofstay(inthedryingchamber):
2-5循环时间cycletime:
2-6干燥率dessicationratio:
2-7去湿速率massflowrateofhumidity:
2-8单位面积去湿速率massflowrateofhumiditypersurfacearea:
2-9干燥速度dryingspeed:
2-10干燥过程dryingprocess:
2-11加热温度heatingtemperature:
2-12干燥温度temperatureofthematerialbeingdried:
2-13干燥损失lossofmaterialduringthedryingprocess:
2-14飞尘liftoff(particles):
2-15堆层厚度thicknessofthematerial:
3.冷冻干燥
3-1冷冻freezing:
(1).静态冷冻staticfreezing:
(2).动态冷冻dynamicfreezing:
(3).离心冷冻centrifugalfreezing:
(4).滚动冷冻shellfreezing:
(5).旋转冷冻spin-freezing:
(6).真空旋转冷冻vacuumspin-freezing:
(7).喷雾冷冻sprayfreezing:
.气流冷冻airblastfreezing:
3-2冷冻速率rateoffreezing:
3-3冷冻物料frozenmaterial:
3-4冰核icecore:
3-5干燥物料外壳envelopeofdriedmatter:
3-6升华表面sublimationfront:
3-7融化位置freezerburn:
4.真空干燥设备;真空冷冻干燥设备
4-1真空干燥设备和真空冷冻干燥设备vacuumdryingplantandvacuumfreezedryingplant:
4-2真空干燥器和冷冻干燥器vacuumdryingchamberandfreezedryingchamber:
4-3加热表面heatingsurface:
4-4物品装载面shelf:
4-5干燥器的处理能力throughput(ofthevacuumdryingchamber):
4-6单位面积干燥器处理能力throughputpershelfarea:
4-7冰冷凝器icecondenser:
4-8冰冷凝器的负载loadoftheicecondenser:
4-9冰冷凝器的额定负载ratedloadoftheicecondenser
8. 1.一般术语
1-1试样sample:
(1).表面层surfacelayer:
(2).真实表面truesurface:
(3).有效表面积effectivesurfacearea:
(4).宏观表面;几何表面macroscopicsurfacearea;geometricsurfacearea:
(5).表面粒子密度surfaceparticledensity:
(6).单分子层monolayer:
(7).表面单分子层粒子密度monolayerdensity:
.覆盖系数coverageratio:
1-2激发excitation:
(1).一次粒子primaryparticle:
(2).一次粒子通量primaryparticleflux:
(3).一次粒子通量密度densityofprimaryparticleflux:
(4).一次粒子负荷primaryparticleload:
(5).一次粒子积分负荷integralloadofprimaryparticle:
(6).一次粒子的入射能量energyoftheincidentprimaryparticle:
(7).激发体积excitedvolume:
.激发面积excitedarea:
(9).激发深度exciteddeath:
(10).二次粒子secondaryparticles:
(11).二次粒子通量secondaryparticleflux:
(12).二次粒子发射能energyoftheemittedsecondaryparticles:
(13).发射体积emittingvolume:
(14).发射面积emittingarea:
(15).发射深度emittingdepth:
(16).信息深度informationdepth:
(17).平均信息深度meaninformationdepth:
1-3入射角angleofincidence:
1-4发射角angleofemission:
1-5观测角observation:
1-6分析表面积analyzedsurfacearea:
1-7产额yield:
1-8表面层微小损伤分析minimumdamagesurfaceanalysis:
1-9表面层无损伤分析non-destructivesurfaceanalysis:
1-10断面深度分析profileanalysisindepth;depthprofileanalysis:
1-11可观测面积observablearea:
1-12可观测立体角observablesolidangle:
1-13接受立体角;观测立体角angleofacceptance:
1-14角分辨能力angularresolvingpower:
1-15发光度luminosity:
1-16二次粒子探测比detectionratioofsecondaryparticles:
1-17表面分析仪的探测极限detectionlim