P5000SiO2DryEtcherPMSOP.docx
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P5000SiO2DryEtcherPMSOP
1.目的:
……………………………………………………………………………………………...2
2.
版面居中
适用范围:
………………………………………………………………………………….…..2
3.定义:
……………………………………………………………………………………………..2
4.权责:
……………………………………………………………………………………………..2
5.材料、工具和易损配件:
…………………………………………………………......3
6.相关文件:
……………………………………………………………………………………..4
7.作业安全卫生环保须知:
……………………………………………….……………..4
7.1作业安全……………………………………………………………………………….….4
7.2卫生环保须知……………………………………………………………..……………5
8.作业内容………………………………………………………………………………………....5
8.1PM执行频率……………………………………………………………………………..5
8.2操作步骤………….……………………………………………………………………….5
9.记录………………………………………………………………………………………………..19
10.文件更改记录…………………………………………………………………………………19
编制
黄相如
批准
1.目的(purpose)
为工程师机台保养提供一个保养规范,提高保养效率;
AstandardofthemaintenanceforMachinemaintenanceengineer,toimprovemaintenanceefficiency;
2.实用范围(Scope)
SiO2PM机台的保养
SiO2machine’sPM
3.定义(Definition)
SOP:
standardoperationprocedure(标准操作流程)
PM:
preventingmaintenance(预防保养)
TMP:
turbomolecularpump(分子泵)
4.权责(Responsibility)
本类机台归属于芯片工程部,主要用于二氧化硅钝化层的刻蚀,机台管理人为黄相如
Themachinesbelongtotheetchingofthechipsegment,mainlyusedforetchingSiO2passivation,ownerisXiangruHuang
5.材料,工具和易损配件(material,toolsandvulnerableparts)
名称(name)
作用function
图片picture
异丙醇IPA
清洗备件cleanparts
内六角扳手allenwrench
拧螺丝turnscrew
氮气枪N2GUN
清除灰尘cleanpartical
无尘布cleancloth
清洗备件cleanparts
吸尘器cleaner
清楚灰尘cleanpartical
清洗机cleaningmachine
清洗备件cleanparts
烘烤机bakeingmachine
烘烤备件bakeparts
盖板cover
盖住静电吸盘,防止灰尘掉在
上面
Covertheelectrodestaticchuck,
Incaseparticalfallonit
6.相关文件(RelatedDocuments)
参照AMATP5000OperationManual
RefertoAMATP5000OperationManual
7.作业安全卫生环保须知(operationsecurity,healthandenvironmentalnotes)
7.1作业安全(operationsecurity)
在做机台保养前需要对机台挂好保养状态,防止外人操作机台对保养人员造成损伤,由于此机台用到的制程气体含有含氟气体,因此设备保养人员在对机台进行保养时需要佩戴防毒面具;
LinkPMstatusforequipmentbeforedoPMtotools,IncaseotherpersonoperatetoolanddamagePMpersons.BecausethetoolsuseprocessgascontainingCF4,PMpersonmustweargasmaskwhendoingPMtotools.
7.2卫生环保须知(environmentalnotes)
由于机台的尾气中含有CF4,因此需要在泵浦的排气端加入湿法静气器;
ExhaustofequipmentcontainsCF4,soweneedequipthewetscrubberatthebackendofdrypupm.
8.作业内容(Operationcontent)
8.1PM执行频率(PMimplementationfrequence)
在机台无异常情况下,每2000片wafer做一次保养,误差为正负150片
Inthenormalstatus,dooncePMevery2000pics.Theerrorofplusorminusis150pics
8.2操作步骤(step)
1.首先确认下机台的状态,确保需要PM的腔体没有Run货,挂好PM工作牌,把Automatic改成Manual。
FirstensurethatthechamberneedPMisnotrunning,displaythePMindicateboard,modifytheequipmentmodefromautomatictomanual.
2.将需要PM的腔体切换成OFFLINE。
TakethePMchambertooffline
3.对PM的腔体做Cyclepurge(30次)
Cyclepurge(30times)tochamberofPM
4.等Cyclepurge完了之后,就可以VentChamber。
Ventchamberaftercompletedcyclepurge.
4.1首先将Gatevalve关闭;
FirstclosetheGatevalve
4.2然后将Turbooff掉,看到TurboController上显示“LEVITATION”就表示Turbo已经停止转动了,可以做下一步动作了;
Closeturbo,whenturbocontrollershow“LEVITATION”message,itmeanstheturbohavecompletedstop.Wecoulddonextaction.
4.3将Forelinevalve和N2关闭;
CloseForelinevalveandN2
4.5将腔体Ventvalve打开;
Opentheventvalveofchamber.
4.6待Chambervent到ATM后,就可以开腔了。
OpenthechamberafterchamberventtoATM.
5.作业人员佩戴好防毒面具,开始PM作业。
ThepersonofPMneedwearmaskanddoPM.
6.关闭Gas手动阀,卸下ChamberLID的螺丝,打开ChamberLID,并拿下ChamberLID.拿下后要去关闭腔体Ventvalve。
Closethegasmanualvalve,takedownthescrewofchamberlid,openchamberlidandtakedownthechamberlidandclosethechamberventvalve.
7.用一字螺丝刀拧开Innerquartzwindow上的12个螺丝帽(要当心这个是很脆弱的,容易坏),拿走之后就能看见下面的螺丝了,拆下螺丝并拿走Innerquartzwindow.
Useflatheadscrewdrivertotakedown12screwsoftheinnerquartzwindow(youmustcarefullybecauseoffragile),youwillseetheunderscrewsandtakedownthemandquartzwindow.
8.取出Quartzexternalring,小心放在塑料膜上(易碎)。
Takeoutthequartzexternalringandcarefullyputitonplasticfilm(fragile).
9.取下Quartzclampringcover,小心放在塑料膜上(易碎)。
Takedownquartzclampringcoverandcarefullyputitonplasticfilm(fragile)
10.取下Quartzpipering和ESCClampO-ring,小心放在塑料膜上。
Takedownthequartzo-ringandESCclampO-ring,carefullyputthemonplasticfilm.
11.清洗腔体以及LoadLock,先用吸尘器吸走肉眼看得见的粉尘颗粒,再用沾了IPA的无尘布去擦拭腔体内壁以及ESC。
Cleanchamberandloadlock,firstusecleanercleanvisibleparticle.thenusecleanroomwipercleanchamberinnerwallandESC.
12.清洗Parts,用IPA清洗刚刚从Chamber内拆除下来的Parts。
CleanthepartsuninstallfromthechamberusingIPA
13.安装Parts,先装Quartzpipering;接着安装ESCClampO-ring;然后安装Quartzclampringcover;再装Quartzclampringcover;然后安装Quartzexternalring;装上Innerquartzwindow;最后装上ChamberLID
InstallQuartzpipering,ESCClampO-ring,Quartzclampringcover,thanins