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InterfaceA
IntroductiontotheSEMIEDAStandards
ThisdocumentisanintroductiontotheSEMIEquipmentDataAcquisition(EDAalsoknownasInterfaceA)standards.ItisalsoavailableinPDFformat.Thisdocumentincludethefollowingsections:
∙anoverviewofthestandards,
∙alistofterminologyandacronyms,
∙asummaryofeachmajorEDASEMIstandardincludingE120,E125,E132,E134,and
∙alistofFrequentlyAskedQuestions.
Overview
TheEquipmentDataAcquisition(EDAalsoknownasInterfaceA)StandardsareacollectionofSEMIstandardsforthesemiconductorindustrytoimproveandfacilitatecommunicationbetweenICMaker’sdatagatheringsoftwareapplicationsandthefactoryEquipment.Whenimplementedtogether,thesestandardsprovideaconvenientinterfaceforEquipmentDataAcquisitionusingSOAP/XMLmessagesoveranHTTPorHTTPSconnection.ThemainEDASEMIstandardsincludeE120,E125,E132,andE134.SolutionsmustcomplywiththespecificSOAP/XMLimplementationsofthesestandards;E120.1,E125.1,E132.1,andE134.1.
EDAprovidesmultipleclientaccesstodatagatheringcapabilities.ItdoesnotpurporttoreplacetheSEMIGEM/SECSstandards(E4,E5,E30,andE37)ortheSEMI300mmstandards(E39,E40,E87,E90,E94,andE116)sinceEDAdoesnotprovideanyfeaturesforEquipmentcontrolorconfiguration.Instead,EDAmustbesupportedinadditiontootherrequiredinterfaces.Overtime,EDAcouldreplacetheneedforanyotherdataprovidinginterfacessothatICMakersonlyrequiretheEDAandSECS/GEM/300mmconnectivitystandards.Inpractice,someinitialEDAdeploymentsmayprovidelittlemoredatathantheSECS/GEMinterface,buteventuallyitisexpectedtoprovidemoredata—particularlystateinformation,sensorfeedback,actuatorstates,andotherrawdatanecessaryforprocess,productandequipmentanalysis.AlldatamustbesuppliedtoEDAasdirectlyfromthesourceaspossiblewithminimalsoftwarelayers.Inordertomakeallexpecteddataavailableandachieveperformanceexpectations,someequipmentwillrequireinternalrestructuringandarchitecturalchanges.
During2005and2006ICMakersstartedrequiringintegratedEDAsolutionsfromtheEquipmentSuppliers.ThedemandwillcontinuetoincreaseasICMakersrolloutplanstoimproveyieldandequipmentutilization.EquipmentSuppliersmustbegindevelopmentassoonaspossibleinordertomeetthesedeadlinesandprovideaqualitysolution.
TerminologyandAcronyms
TermorAcronym
Description
3507
IDforE132duringtheTaskForcedevelopmentstage.
3509
IDforE134duringtheTaskForcedevelopmentstage.
AccessControlList(ACL)
PartofE132,theClientAuthorizationdetailsthatgrantordenyClientsessionsandimposerestrictionsonClientsaccesstospecificInterfaceAinformationandoperations.
CEM
E120.1XMLSchemafortheCommonEquipmentModel
ClientAuthentication
InorderforanInterfaceAClienttogatherdata,E132requiresclientstofirstestablishasession.TheclientmustprovidecredentialstotheInterfaceAServer.TheInterfaceAServermustbepreconfiguredtogranttheclientpermission(basedonthecredentials)toestablishasession.
ClientAuthorization
PartofE132,beforetheInterfaceAServeracceptsanoperationrequestfromtheClient,theServermustverifythattheClienthaspermission.ThesepermissionsarepreconfiguredintheServerusingAccessControlLists.
ClientConsumer
AnInterfaceAClientthatreceivestheDataCollectionReportsandotherE134consumeroperations.
ClientManager
AnInterfaceAClientthatestablishesasession,identifiestheConsumertoreceivethedata,setsupDataCollectionPlans,andusesotherE134,E132,andE125manageroperations.
DataCollectionPlan(DCP)
PartofE134,adatagatheringrequestthatincludesasetofEvents(withaconfigurablesetofParameters),Exceptions(withafixedsetofParameters),andTraces(withaconfigurablesetofParameters).AftersuccessfullycreatingaDataCollectionPlan,itmustbeactivated.ThentheClientwillreceivetherespectiveDataCollectionReportsasconfiguredintheplan.
DataCollectionReport(DCR)
TheEquipmentsendstherequesteddatainthisstandardformat.
DCM
E134.1ProvisionalSpecificationforSOAPBindingofDataCollectionManagement
ECA
E132.1ProvisionalSpecificationforSOAPBindingforEquipmentClientAuthenticationandAuthorization
EDA
EquipmentDataAcquisition.ThecombinationofSEMIstandardsE120,E125,E128,E132,E134andE138.Thistermismorecommontheterm“InterfaceA”,butbothrefertothesamething.Ofcourse,theEDAacronymisalsousedinthesemiconductorindustrytostandforElectronicDesignAutomation,butthisisunrelatedtothisdocumentorthereferencedSEMIstandards.
Equipment
EquipmentreferstothehardwareandsoftwarereceivedfromEquipmentSuppliertoperformworkfortheICMaker.InsomecontextofInterfaceA,EquipmentreferstotheInterfaceAServerthatrepresentsthehardwareandsoftwaretotheClients.
ESDS
E125.1ProvisionalSpecificationforSOAPBindingforEquipmentSelfDescription
Exception
PartofE134,anEquipmentalarm,error,orwarningnotification.
Event
PartofE134,anotificationthatsomethingimportantoccurredontheEquipmenttiedtoastatemachine.AnEventrequestinaDCPcanincludeanysetofParameters.
FF
Fire-and-Forgetwhereamessagesenderdoesnotexpectareplymessage.
Host
ThesoftwareanICMakerisrunningtocommunicatewiththeEquipment.AhosttypicallyreferstotheSECS/GEMconnectionbutcouldalsorefertoaclientusingInterfaceA.
HTTP
HyperTextTransferProtocol:
theprotocolformovinghypertextfilesacrosstheInternet.RequiresaHTTPclientprogramononeend,andanHTTPserverprogramontheotherend.HTTPisthemostimportantprotocolusedintheWorldWideWeb(WWW)
HTTPS
HyperTextTransportProtocol(Secure):
thestandardencryptedcommunicationmechanismontheWorldWideWeb.ThisisactuallyjusttheuseofNetscape'sSecureSocketLayer(SSL)asalayerunderitsregularHTTPapplicationlayering.
InterfaceA
TheresultingEquipmentinterfacewhenSEMIstandardsE120,E125,E132,andE134areimplementedtogether.InterfaceAisalsoknownasEDA.
InterfaceAClient
SoftwarethatattemptstousetheEquipment’sInterfaceAbyestablishingasession.Typically,thisisdevelopedbytheICMakerorathirdpartyhiredbytheICMaker.EquipmentsupplierscanalsodevelopInterfaceAclients,suchasforcapturingdiagnosticinformation.ThisisalsocalledanEDAClient.
InterfaceAServer
TheEquipmentsoftwarethatimplementstheInterfaceAstandards.ThissoftwareshouldbeinstalledontheEquipment’sinternalcomputerandfullyintegratedintotheEquipment’ssystem.However,thesoftwarecanberunonanexternalcomputertoretrofitEquipmentthatdoesnothaveanintegratedsolution.ThisisalsocalledanEDAServerorEDAWebServer.
InterfaceB
AcollectionofSEMIstandardstoimplementdatasharingbetweenapplications(primarilyICMakerapplications),suchasStatisticalProcessControlandRun-To-Runapplications.
InterfaceC
AcollectionofSEMIstandardstoallowremoteaccesstoEquipmentdata.ThisisintendedprimarilyforEquipmentSupplierstoremoteobtaintheEquipment'sdiagnosticandmaintenanceinformation.
Metadata
Informationthatdescribesthedata,suchaswhenanEventoccursortheinterpretationofaParameter'svalue.
Operation
AnInterfaceAtransaction,method,ormessageinitiatedbyanInterfaceAclientorserver.Eachoperationhasaname,well-definedformatandmeaning.E125,E132,andE134eachdefineasetofoperationsfortheclientandserver.
Parameters
ThesetofdataavailableforgatheringfromtheEquipment'sInterfaceAconnection.
PR8
ProposedStandardfortheEquipmentDataAcquisition:
apreviousnamefortheE134standard.
RR
Request-Responsewhereamessagesenderexpectsareplymessage.
SecurityAdmin
ApartofE132,SecurityAdminisautilityprovidedwiththeInterfaceAServertoprovideadministrativeconfiguration.
Session
AlsocalledanAuthenticatedSession,asessionisestablishedbetweentheServerandClientbyfollowingtheE132procedures.Onceasessionisestablished,theClientcansendauthorizedoperationmessages.
SOAP
SimpleObjectAccessProtocol(SOAP):
InordertomaketheInterfaceAstandardseasiertoimplement,theyusetheSOAPprotocol.Itisalightweightprotocolforexchangeofinformationinadecentralized,distributedenvironment.ItisanXMLbasedprotocolthatconsistsofthreeparts:
anenvelopethatdefinesaframeworkfordescribingwhatisinamessageandhowtoprocessit,asetofencodingrulesforexpressinginstancesofapplication-defineddatatypes,andaconventionforrepresentingremoteprocedurecallsandresponses.SOAPcanpotentiallybeusedincombinationwithavarietyofotherprotocols;however,theonlybindingsdefinedinthisdocumentdescribehowtouseSOAPincombinationwithHTTPandHTTPExtensionFramework.Seewww.w3.org/TR/2000/NOTE-SOAP-20000508information.
Tool
AsynonymforEquipment.ThetermEquipmentisusedmorefrequentlyinthestandards.
Trace
DatapollingperformedbytheEquipmentasdefinedbytheClient.TheClientdefinesthepollingfrequency,thesetofpolledParameters,andtheconditionstostartandstoppolling.
UML
UnifiedModelingLanguage(UML):
AlloftheInterfaceAstandardsuseUMLnotationforallclassdiagramsandforobjectorienteddiagramsprovidedasexamples.UMLisanotationforrepresentingobject-orienteddesignsandviewscreatedbyBooch,Rumbaugh,andJacobsoninordertomergetheirthreepopularnotat