外文翻译空调排气热回收实验半导体车间热回收型洁净空调系统.docx

外文翻译空调排气热回收实验半导体车间热回收型洁净空调系统.docx

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外文翻译空调排气热回收实验半导体车间热回收型洁净空调系统

外文翻译--空调排气热回收实验半导体车间热回收型洁净空调系统

中文4564字

出处：

第七届亚洲气溶胶会议论文集.2011

附录

英文文献翻译

AnExperimentonEnergyReductionofanExhaustAirHeatRecoveryTypeOutdoorAirConditioningSystemforSemiconductorManufacturingCleanRooms

Kyung-HoonYoo1,Gen-SooSong1,Hyung-TaeKim1,Seung-WooSon2andDug-JunPark3

1NanoscaleContaminationControlLaboratory,KoreaInstituteofIndustrialTechnology

（KITECH）,1271-18,Sa-1-dong,Ansan-si,426-171,Gyeonggi-do,SouthKorea

2SunglimPSCo.,1301,NamseongPlaza,345-30,Gasan-dong,Geumcheon-gu,Seoul,153-802

3ShinsungENGCo.,404-1,Baekhyeon-dong,Bundang-gu,Seongnam-si,463-420

ABSTRACT

Inrecentsemiconductormanufacturingcleanrooms,theenergyconsumptionofanoutdoorairconditioningsystemrepresentsabout45%ofthetotalairconditioningloadrequiredtomaintainacleanroomenvironment.Meanwhile,thereisalargeamountofexhaustairfromacleanroom.Fromanenergyconservationpointofview,heatrecoveryfromtheexhaustairisthereforeusefulforreducingtheoutdoorairconditioningloadforacleanroom.Inthepresentwork,anenergy-efficientoutdoorairconditioningsystemwasproposedtoreducetheoutdoorairconditioningloadbyutilizinganairwashertorecoverheatfromtheexhaustair.Theproposedoutdoorairconditioningsystemconsistedmainlyofapre-heater,anairwasher,twostagecoolingcoils,areheatingcoil,ahumidifierandtwoheatrecoverycoolingcoilsinsertedintotheairwasherandconnectedtoawetscrubber.Itwasshownfromthelab-scaleexperimentwithoutdoorairflowof1,000m3/hthattheproposedsystemwasmoreenergy-efficientforthesummerandwinteroperationsthananoutdoorairconditioningsystemwithasimpleairwasher.

KEYWORDS:

SemiconductorManufacturingCleanRoom,OutdoorAirConditioningSystem,AirWasher,HeatRecovery,EnergyReduction.

Introduction

Forrecentsemiconductormanufacturingcleanrooms,theenergyconsumptionofanoutdoorairconditioning（hereafterOAC）systemrepresentsabout45%ofthetotalairconditioningloadrequiredtomaintainacleanroomenvironment[1,2].Inaddition,thereisalargequantityofexhaustairfromacleanroom,leadingtotheconsequentlargeamountofwasteheat.Fromanenergysavingpointofview,heatrecoveryfromtheexhaustairisthereforehelpfulforreducingtheoutdoorairconditioningloadforacleanroom.Recently,airwashershavebeensometimesusedinOACsystemsforsemiconductormanufacturingcleanroomstocontrolhumidityandsimultaneouslyremovesuspendeddustsandgaseouscontaminantssuchasNH3,SOx,NOxandorganicgasesinincomingoutdoorair,asshowninFigure1.Meanwhile,sincetheexhaustaircarrieschemicallytoxicgaseousmatter,awetscrubberhastobeusedtohandleitbeforeitisdischargedtotheatmosphere.Inthewetscrubbertheheattransferbetweentheexhaustairandthescrubbingwateralwaystakesplace.Thetransferredheatdeservesutilizingtoheatorcooltheincomingoutdoorair,whichneedstobecontactedindirectlywiththescrubbingwaterbecauseofprotectionfromcontamination.

Figure1.Schematicdiagramoftheproposedenergyefficientoutdoorairconditioningsystemwithanairwasherofheatrecoveryfunction.

SofaronlyafewstudiesregardingtheairwasherwiththeheatrecoveryfunctionforsemiconductorcleanroomshavebeenconductedbyFujisawaetal.[3,4],Shiromaetal.[5]andYamamotoetal.[6].NoneoftheabovementionedpublicationsseemstohavebeendescribedsufficientlyindetailtoallowtheunderstandingoftheoverallenergyconsumptionandsavingperformanceoftheOACsystem.Theyfocusedonlyonheatrecoveryequipment,notontheOACsystemitself.Thereforetheeffectofairconditioningprocessconstraintssuchassupplyairconditionandthecombinationwithheating/coolingcoilsontheenergysavingperformanceofanenergy-efficientOACsystemdesignneedstobetakenintoaccount.Inthepresentwork,anenergy-efficientOACsystemwasproposedtoreducetheoutdoorairconditioningloadbyutilizingtheairwasherwithheatrecoveryfunctionbasedonthepreviousworkbyFujisawaetal.[3,4]andYamamotoetal.[6].TheproposedOACsystemconsistedmainlyofairfilters,apre-heater,anairwasher,twostagecoolingcoils,areheatingcoil,ahumidifier,andtwoheatrecoverycoolingcoilsinsertedintotheairwasherandconnectedtoawetscrubber,asshowninFigure2.Anexperimentwascarriedoutonthelab-scalewithanairflowof1000m3/hregardingenergyconsumptionandsavingoftheproposedenergy-efficientOACsystemcomparedwiththeOACsystemwithasimpleairwasher.

ExperimentalMethods

Figure2.Schematicdiagramofthepresentexperimentalapparatusfortheenergy-efficientoutdoorairconditioningsystemwithheatrecoveryfunction.

Figure2showstheschematicdiagramoftheoverallexperimentalapparatusfortheproposedenergy-efficientOACsystemtoevaluatetheenergyconsumptionandsavingperformance.TheexperimentalapparatusforthesimpleairwasherOACsystemwithnoheatrecoveryconsistedofacleanwindtunnel,aHEPAfilter,aconstanttemperatureandhumiditychamber,anairwasher,aneliminator,twostagecoolingcoils,areheatingelectricheater,ahumidifierandafan.Asfortheexperimentalapparatusfortheenergy-efficientOACsystemwithheatrecoveryfunctionawetscrubber,anintermediateheatexchanger,primaryandsecondarywaterpumps,twocooling/heatingcoilsintheairwasherandasmallcleanroomasshowninFigure3wereaddedtothatoftheabovementionedsimpleairwasherOACsystem.Table1showstheexperimentalconditionofthepresentenergy-efficientOACsystemwithheatrecoveryfunction.Theairwasherwasinstalledinthecleanwindtunnelwiththecrosssectionof0.33had2modulescomprisedof4banksof48nozzles.Thepresentnozzleswithouterdiameterof1/8insprayedcitywaterwith0.7MPainbothofthecounter-andco-currentdirectionssimultaneously.Fortheenergy-efficientOACsystemacoolingcoilwasadditivelyinsertedinthemiddleofairwashermoduleinordertorecoverwasteheatthroughtheintermediateheatexchangerfromtheexhaustairinthewetscrubberanduseittoheatorcooltheincomingoutdoorair,asshowninFigure3.Asforthereheatingcoilandsteamhumidifieranelectricheaterandanelectrode-typesteamhumidifierwereusedrespectivelyinsteadofafossilfuelboilertounifythemeasurementintoelectricpower.Theelectricpowersensorswereinstalledtomeasuretheelectricpowerconsumption,asshowninFigure1and2.ALMEMOMA5990-2dataloggerandsensorswereinstalledtomeasuretemperatureandrelativehumidityinthewindtunnel.Thetemperatureandhumiditysensorwasinstalledattheeachoutletoftheconstanttemperatureandhumiditychamber,theairwasher,thecoolingcoil,thereheatingheaterandthehumidifiertoinvestigatetheairconditioningprocessandrecoveredheatoftheOACsystemonapsychrometricchart.

Table1ExperimentalconditionofthepresentexhaustairheatrecoverytypeOACsystem.

ResultsandDiscussion

Figure4showstheexperimentalresultsofthepsychrometricprocessforthesimpleairwasherOACsystemandtheenergy-efficientOACsystemforthewinteroperationshowninTable1.BecausethetwoOACsystemshavethesameupstreamconditions,theconstanttemperatureandhumiditychambershowninFigure3createdtheinletconditionofairwasher,16.5oC,9%RH,asshowninFigure4.ItcanbeseeninFigure4thattheenergy-efficientOACsystemrecoveredspecificenthalpy3kJ/kgfromtheexhaustair.Thecorrespondingrecoveredheatis1.01kwfor1000m3/h.

Figure4.Variationoftheairconditioningprocessonpsychrometricchartbyheatrecoveryforthewinteroperation.

Figure5.Variationoftheairconditioningprocessonpsychrometricchartbyheatrecoveryforthesummeroperation.

Figure5showstheexperimentalresultsofthepsychrometricprocessforthesimpleairwasherandtheenergy-efficientOACsystemsforthesummeroperationshowninTable1.ItcanbeseeninFigure5thattheenergy-efficientOACsystemrecovered15.5kJ/kgfromtheexhaustair,correspondingto5.18kWfor1000m3/h.Table2summarizestheexperimentalresultsofrecoveredheat,electricpowerconsumptionandsavingforthepresentOACsystemsforsemiconductorcleanroomswiththeoperationalconditionofTable1.Itcanbeseeninthetablethattherecoveredheatleadstotheelectricpowerreductionforthewinterandsummeroperations.Itisalsoobservedforthewinterandsummeroperationsthatalthoughtherecoveredheatforthesummeroperationismuchlargerthanthatforthewinteroperationthereducedelectricpowerforthesummercaseissmallerthanthatforthewintercase.InadditionthecorrespondingreducedpowerforthesummercaseissmallcomparedtotherecoveredheatmainlybecauseoftheCOPofchiller.Ontheotherhand,asforthemidtermoperationtherecoveredheatdoesnotmakereductionofelectricpowerbecausetheamountofheatrecoveredistoosmalltosurpasstheadditivepowerconsumptionduetoprimary/secondarypumpsandincreasedpressuredropofinsertedcoolingcoilsintheairwasherforheatrecoveryoperation.

Table2Summaryofenergyconsumptionandheatrecovery

CONCLUSION

Followingobservationsareobtainedfromthepresentexperimentalresultsontherecoveredheatandtheenergyconsumptionandsavingforthesimpleandenergy-efficientairwashertypeOACsystemsforsemiconductormanufacturingcleanrooms.

（1）Theproposedenergy-efficientOACsystemrecoveredsomeofthewasteheatoftheexhaustairandsavedtheconsequentelectricpowerconsumptionforthe