ESD控制与管理文档格式.docx
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Garments(防静电工衣)
ANSI/ESDSTM2.1,
5
Ionization(离子化消静电设备)
ANSI/ESDSTM3.1,
6
PeriodicVerificationofAirIonizers(离子化消静电设备的周期性验证)
ANSI/ESDSP3.3,
7
Worksurfaces–ResistanceMeasurements(工作台垫的电阻测试)
ANSI/ESDS4.1,
8
ESDProtectiveWorksurfaces–ChargeDissipationCharacteristics(工作台的消静电特性测量)
ANSI/ESDSTM4.2,
9
Grounding(接地)
ANSI/ESDS6.1,
10
FloorMaterials–CharacterizationofMaterials(防静电地板材料)
ANSI/ESDS7.1,
11
Footwear–ResistiveCharacterization(防静电鞋装的阻值特性)
ANSI/ESDSTM9.1,
12
FloorMaterialsandFootwear–ResistanceMeasurementinCombinationwithaPerson(人体鞋装-地板系统电阻的测量)
ANSI/ESDSTM97.1
13
ComplianceVerificationofESDProtectiveEquipmentandMaterials(防静电设施和材料的符合性检测)
ESDTR53,
14
Seating-ResistiveMeasurement(坐椅电阻测试)
ANSI/ESDSTM12.1,
15
PackagingMaterialsforESDSensitiveItems(ESD敏感器件的包装材料)
ANSI/ESDS541,
4.DEFINITIONS
a)Acronyms
RTG
ResistanceToGround
RTG-对地电阻
EPA
ESDProtectedArea
ESD保护区
b)Definitions
ESD
ESD-静电释放
ElectroStaticDischarge,thetransferormovementofchargebetweenobjectsthatareatdifferentelectricalpotentialsbydirectcontactorinducedbyelectrostaticfield.
是指通过直接接触或静电场感应的方式,在不同电势差物体间的电荷转移或移动。
VolumeResistivity
体积电阻率
It’susedtomeasureandanalyzethehomogeneousmaterial,it’smeasuredandexpressedinohm·
cm
用来测量和分析均质的材料,依欧姆·
厘米为单位
SurfaceResistivity
表面电阻率
Itisusedtomeasureandanalyzethesurface-finishmaterial.It’smeasuredandexpressedinohms/sq.
用来测量和分析表面处理的材料,依欧姆/平方为单位。
ESDS
ElectrostaticDischargeSusceptibility(Sensitivity):
TheESDlevelthatcausescomponentfailure.
ESDS-致使元器件失效的ESD水平(即敏感度)。
AntistaticMaterial(Lowchargingmaterial)
防静电材料(低带电性材料)
Thematerialthatusedtoprevent/inhibitthegenerationoftheTriboelectricCharge;
orthematerialthatonlygeneratelessthan200VTriboelectricvoltage;
ithasnorequirementaboutsurfaceresistivityandvolumeresistivity.
能抑制摩擦生电的材料;
摩擦电压在200V以下的材料;
防静电材料没有表面电阻率或体积电阻率的要求。
StaticDissipativeMaterial
静电耗散性材料
Thematerialhasenoughconductivitytoallowappliedelectrostaticchargestodissipateprovidingtheconductivitycannotgenerateelectricshockhazard;
surfaceresistivityisbetween10^5ohm/squareand10^12ohm/squareorvolumeresistivityisbetween10^4ohm·
cm10^11ohm·
cm.
材料具备一定的导电率以便使静电荷被耗散掉,但导电率不可大到产生危害性电冲击的程度;
表面电阻率处于是10^5欧姆/平方到10^12欧姆/平方之间或体积电阻率处于是10^4欧姆·
厘米到期10^11欧姆·
厘米之间.
StaticShieldingMaterial
静电屏蔽材料
Whenthismaterialisusedintheformofbagorcontainer,itwillcreatetheFaradayCageEffectwhichpreventsexternalelectrostaticfieldsfrompenetratingthecontainerorbag,andsurfaceresistanceislessthan10^3ohm.
当该材料被做成包装袋或容器的形式时会产生法拉第的静电屏蔽效应,可防止外部静电场穿透屏蔽容器或包装袋,表面电阻小于10^3欧姆.
ConductiveMaterial
导电性材料
Thematerialwhosesurfaceresistivityislessthan10^5ohms/squareorvolumeresistivityislessthan10^4ohm·
cm.
表面电阻率小于10^5欧姆/平方或体积电阻率小于10^4欧姆·
厘米的材料。
Insulativematerial
绝缘材料
Thesurfaceresistivityismorethan10^12ohms/squareorvolumeresistivityismorethan10^11ohm·
表面电阻率大于10^12欧姆/平方或体积电阻率大于10^11欧姆·
厘米的材料.
ESDSensitiveMaterial
静电敏感材料
Apart,Assemblyorproductthatcanbedegradedordamagedbystaticcharge,e.g.componentscontainingthinfilmsorinsulators,includingresistors,capacitors,ICandsemiconductordevices.EachsegmentshouldmakeadocumentforthemostsensitiveclassofallESDsensitivematerials.
能够被静电释放损坏或性能降级的元件组装件或产品。
如电阻,电容集成电路以及半导体装置等,各个工厂应对静电敏感材料就最敏感程度予以文件规定。
ElectromagneticShieldingMaterials
电磁屏蔽材料
Thematerialwhosesurfaceresistanceislessthan10ohm.
表面电阻小于10欧的材料
HumanBodyModel(HBM)
人体带电释放模式(HBM)
HBMisthecauseofdirecttransferofElectrostaticchargefromhumanbodytoElectroniccomponent.
静电由人体释放到电子元件上的模式。
MachineModel(MM)
设备静电释放模式(MM)
MMisthecauseofdirecttransferofElectrostaticchargefromMachine/ToolstoElectroniccomponent.
静电由机器设备/工具上转移至电子元件上的模式
ChargeDeviceModel(CDM)
装置静电释放模式(CDM)
Thetransferofchargefromdevice,Thiseventoccurwhenadevicemovesacrossasurfaceorgetcharged-upbyothertriboelectrification.
静电在装置上的转移现象,主要出现在装置在表面移动时由于摩擦静电所产生的带电现象。
FieldInducedModel(FIM)
电场感应模式(FIM)
FIMmodelmayoccurwhenESDSensitiveitemisplacednearorinsideelectrostaticfield.
主要出现在当静电敏感元件被置于静电电场附近或静电场内所发生的带电模式。
TurboelectricCharge
摩擦静电
Thegenerationofelectrostaticchargewhentwomaterialsmakecontactorarerubbedtogether,thenseparated.
由两种材料在接触和分离的过程中产生的静电。
Induction
感应现象
Oneitemwithanelectricalchargeinfluencesanotheritemtohaveasimilarchargewithoutdirectcontact.
在没有直接接触的情况下,带电物体导致另一物体带电的现象
C)Responsibility(职责)
ESDcoordinator(ESD协调员)
ResponsibleformaintainandupdatethisproceduretomeetANSI/ESDstandardandcustomerrequirements.
负责维护和更新此程序,以满足ANSI/ESD标准及客户的要求。
Manufacture(生产部)
ResponsiblefortheimplementofESDontheworkshop.aswellasthemonitorofanyonewhohandleparts.KeepESDtestrecord..
负责ESD生产线的执行,对接触产品的监督,保存检查记录.ESD保护区
Material(物料部)
ResponsibleforthemanagementofESDprotectivematerialsupplier.aswellasthecontrol/issueofESDprotectivegarments.
负责对ESD防护用品供应商的管理,管理静电防护衣服/鞋/手环的发放和保养及更换
ProcessQualityEngineering(工艺质量工程师)
Responsiblefortheimplementationofcomplianceverificationplanforrelatedline.
负责相应生产线ESD符合性验证计划的执行.
ProcessEngineering(工艺工程师)
ResponsibleforESDmaintenanceoftoolsaswellastoinformESDcoordinatorforthetestingofnewly-boughttools.
负责工艺工具的ESD维护,所有新购的工具必须通知ESD协调员测试
Facility(设备部)
ResponsibleforESDmaintenanceofSMTandwavesolderequipmentaswellastoinformESDcoordinatorforthetestingofnewly-boughtequipment.
负责所有设备的ESD维护,所有新购的设备必须通知ESD协调员测试
TestEngineering(测试工程部)
ResponsibleforESDmaintenanceoftesttools/fixturesaswellastoinformESDcoordinatorforthetestingofnewly-boughttesttools/fixtures.
负责测试工具的ESD维护,所有新购的测试工具必须通知ESD协调员测试
IndustrialEngineering(工业工程部)
Responsibleforallnewly-builtworktable/equipmentsetupaswellastoinformESDcoordinatorwheneverthereisrelocationofequipment/worktable.
负责所有设备新建的ESD维护,移动必须通知ESD协调员测试
HR(人事部)
ResponsibleforESDtrainingplan/programandretainingtrainingrecordsforthefactory.
负责协调和执行培训计划/项目和培训记录保存.
HSE(健康安全部)
ResponsibleforthemanagementofESDprotectivegarments.
负责对ESD防护用品静电防护衣服/鞋保养及更换
5.REVISIONCHANGES
Rev.#
RevisionDate
Author
Comments
A
Feb21,2009
GaoBing
InitialRevision
Furtherrevisionsareavailableattheamendmentlist.
6.RECORDREQUIREMENTS
Allrecordedoutput(records)generatedduringthisprocessmustbelistedandmaintained.
Recordgeneratedduringprocess
Recordgenerated/completedby
Locationoftheoriginal
Recordretention
Period
Recordowner/retentionmedium
TACSESDCalibrationRegister
PQE
Oneyear
E_400_4_04_784-Auditchecklistform
E_400_4_15_784_EN
Allstaff
7.MEASUREOFPERFORMANCE(MOP´
s)
Thesearesettoevaluatetheperformanceofprocessesdescribedinthisdocument(e.g.processingtime,improvementvalues).ISO/TS16949requirement.
Measurable
Unit
Frequency
ReportingTool
8.PROCESSDESCRIPTION
8.1Personalgrounding个人接地
EveryoneshouldwearpersonalESDprotectequipmentwhenenteringEPA.ThedetailrequirementseetheESDpersonalrequirement.
任何人进入EPA需穿戴好个人ESD防护设备,具体要求看ESD个人防护要求.
ItisNotacceptedandstrictlyforbiddenthatanyonegoesourofTACSbuildingwithESDsmockandshoeson.
严格禁止穿戴任何防静电衣服和鞋子走出厂房以外.
A.TACSusethebuttonwriststrap.WriststrapisrequiredforanyonehandlingESDScomponentsorassemblieswhileseated,regardlessoffootwear’sgrounding.WriststrapsaretobetestedeverydaybeforehandlingESDsensitiveitems.AndthetestresultshallberecordedinESDWristStrapandESDShoeTestRecordforOperators(QEI/7.5-01-05)Ifthestrapfailsitmustbereplaced.
TACS使用纽扣式手环,坐着进行ESD敏感件操作必须佩带手环,不管鞋子是否已接地.手环需要每天在使用前进行测试.测试结果应记录在操作员ESD手环/鞋子测试表中.如测试失败应进行更换.
B.ESDFootwear鞋子
ESDconductiveshoesareusedtogroundpersonnelinareaswheretherearegroundedconductiveordissipativefloormats,orwherethefloor'
ssurfaceresistanceor/andRTGmeasuresbetween104and106ohms.Itisimportantthatthepersonnelweartwofootwearsatalltimes.
ESD导电鞋用于人员在导电地板或耗散地垫,及表面电阻或/和接地电阻在104~106欧姆的地板上进行人员接地.员工必须两脚同时穿着ESD导电鞋.
ConductivefootwearshallbetestedbeforehandlingESDSitemseachday.Footwearthatfailsthetestshouldbecleaned,adjusted,andretested.Ifthefootwearstillfailsitmustbereplaced.
导电鞋每天需进行测试.测试失效的鞋子应进行清洁后重新测试,若仍然失效则需更换.
CustomerandsuppliermustwearfootwearsbeforeentertheEPA.
客户与供应商进入防静电区域必须穿着ESD导电鞋..
C.Smocks衣服
ThecolourofSmockdefination:
staff(paleblue),supplier(darkblue),customer(white).
衣服的颜色定义为:
员工(浅蓝),供应商(深蓝),客户(白色).
SmocksmustbeworninallESDcontrolareas.Theyshouldbekeptcleanandcoverallpersonalclothingandtouchesoperatorskinatwrists