电容触摸屏控制设计外文文献及中文翻译Word文档格式.docx
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Thispaperdescribesanovelhigh-performance,low-cost,capacitivedisplacementmeasuringsystemfeaturing:
1mmmeasuringrange,
1μmaccuracy,
0.1stotalmeasuringtime.
Translatedtothecapacitivedomain,thespecificationscorrespondto:
apossiblerangeof1pF。
only50fFofthisrangeisusedforthedisplacementtransducer。
50aFabsolutecapacitance-measuringinaccuracy.
MeijerandSchrier[l]andmorerecentlyVanDrecht,Meijer,andDeJong[2]haveproposedadisplacement-measuringsystem,usingaPSD(PositionSensitiveDetector)assensingelement.SomedisadvantagesofusingaPSDarethehighercostsandthehigherpowerconsumptionofthePSDandLED(Light-EmittingDiode)ascomparedtothecapacitivesensorelementsdescribedinthispaper.
Thesignalprocessorusestheconceptspresentedin[2],butisadoptedfortheuseofcapacitiveelements.Bytheextensiveuseofshielding,guardingandsmartA/Dconversion,thesystemisabletocombineahighaccuracywithaverylowcost-price.Thetransducerproducesthree-period-modulatedsignalswhichcanbeselectedanddirectlyreadoutbyamicrocontroller.Themicrocontroller,inreturn,calculatesthedisplacementandcansendthisvaluetoahostcomputer(Fig.1)oradisplayordriveanactuator.
Fig.1.Blockdiagramofthesystem
Fig.2.Perspectiveanddimensionsoftheelectrodestructure
Ⅱ.THEELECTRODESTRUCTURE
ThebasicsensingelementconsistsoftwosimpleelectrodeswithcapacitanceCx,(Fig.2).Thesmallerone(E2)issurroundedbyaguardelectrode.Thankstotheuseoftheguardelectrode,thecapacitanceCxbetweenthetwoelectrodesisindependentofmovements(lateraldisplacementsaswellasrotations)paralleltotheelectrodesurface.TheinfluenceoftheparasiticcapacitancesCpwillbeeliminatedaswillbediscussedinSectionⅢ.
AccordingtoHeerens[3],therelativedeviationinthecapacitanceCxbetweenthetwoelectrodescausedbythefiniteguardelectrodesizeissmallerthan:
δ<
e-π(x/d)
(1)
wherexisthewidthoftheguardanddthedistancebetweentheelectrodes.Thisdeviationintroducesanonlinearity.Thereforewerequirethatδislessthan100ppm.Alsothegapbetweenthesmallelectrodeandthesurroundingguardcausesadeviation:
e-π(d/s)
(2)
withsthewidthofthegap.Thisdeviationisnegligiblecomparedto(l),whenthegapwidthislessthan1/3ofthedistancebetweentheelectrodes.
Anothercauseoferrorsoriginatesfromapossiblefiniteskewangleαbetweenthetwoelectrodes(Fig.3).Assumingthefollowingconditions:
thepotentialsonthesmallelectrodeandtheguardelectrodeareequalto0V,
thepotentialonthelargeelectrodeisequaltoVvolt,
theguardelectrodeislargeenough,
itcanbeseenthattheelectricfieldwillbeconcentric.
Fig.3.Electrodeswithangleα.
Tokeepthecalculationssimple,wewillassumetheelectrodestobeinfinitelylargeinonedirection.Nowtheproblemisatwo-dimensionalonethatcanbesolvedbyusingpolar-coordinates(r,φ).Inthiscasetheelectricalfieldcanbedescribedby:
(3)
Tocalculatethechargeonthesmallelectrode,wesetφto0andintegrateoverr:
(4)
withBltheleftborderofthesmallelectrode:
(5)
andBrtherightborder:
(6)
Solving(4)resultsin:
(7)
Forsmallα'
sthiscanbeapproximatedby:
(8)
Itappearstobedesirabletochooselsmallerthand,sotheerrorwilldependonlyontheangleα.Inourcase,achangeintheangleof0.6°
willcauseanerrorlessthan100ppm.
Withaproperdesigntheparametersεoandlareconstant,andthenthecapacitancebetweenthetwoelectrodeswilldependonlyonthedistancedbetweentheelectrodes.
Ⅲ.ELIMINATIONOFPARASITICCAPACITANCES
BesidesthedesiredsensorcapacitanceC,therearealsomanyparasiticcapacitancesintheactualstructure(Fig.2).ThesecapacitancescanbemodeledasshowninFig.4.HereCplrepresentstheparasiticcapacitancesfromtheelectrodeE1andCp2fromtheelectrodeE2totheguardelectrodesandtheshielding.ParasiticcapacitanceCp3resultsfromimperfectshieldingandformsanoffsetcapacitance.WhenthetransducercapacitanceCxisconnectedtoanACvoltagesourceandthecurrentthroughtheelectrodeismeasured,CplandCp2willbeeliminated.Cp3canbeeliminatedbyperforminganoffsetmeasurement.
Fig.4.Eliminationofparasiticcapacitances
Thecurrentismeasuredbytheamplifierwithshuntfeedback,wh