09462 Operating Instructions R1.docx

1、09462 Operating Instructions R1Chemical Design Inc.PROCESSES PLANTS EQUIPMENTOPERATING INSTRUCTIONSPOLY PLANT VENT GAS RECOVERYCDI 0946-2GOUDIAN INNER MONGOLIA JINGYANG ENERGY CO., LTD.INNER MONGOLIA, CHINA CONFIDENTIAL Prepared byCHEMICAL DESIGN, INC.285 Market StreetP.O. Box 513Lockport, New York

2、14095-0513Phone (716) 433-6744 Fax (716) 439-4019 Rev. 0: 8 July 2010Rev. 1: 9 August 20101.0 PROCESS DESCRIPTION1.1 VENT GAS CONDENSING1.2 COMPRESSION1.3 ABSORPTION AND DISTILLATION1.4 ADSORPTION SYSTEM1.5 DESIGN BASIS1.6 UTILITIES2.0 PRESTARTUP2.1 INSTALL TOWER PACKING2.2 PUMPS2.3 FILL AND DRY HEA

3、TING MEDIUM SYSTEM2.4 LOAD CARBON INTO ADSORBERS T-204A/B/C2.5 BLANKET SYSTEM WITH NITROGEN2.6 COMPRESSORS2.7 CALIBRATE INSTRUMENTS2.8 CHECK PROGRAM LOGIC2.8.1 VALVE AUTO/MANUAL2.8.2 SEQUENCE AUTO/MANUAL2.8.3 STEP ADVANCE2.8.4 STEP INCOMPLETE ALARM2.8.5 VALVE POSITION ALARM2.8.6 UNIT SHUTDOWN2.8.7 D

4、EPRESSURING STEP RAMP2.9 CHECK SEQUENCE CONTROL2.10 CHECK EMERGENCY SHUTDOWN SYSTEMS2.11 COMMISSION UTILITIES2.12 PUMP DOWN AND CHARGE REFRIGERANT SYSTEMS2.13 INSULATION3.0 STARTUP3.1 PURGE WITH NITROGEN3.2 DRY ADSORBERS3.3 CYCLE ADSORBERS3.4 DRY FEED COMPRESSORS3.5 DISPLACE NITROGEN WITH HYDROGEN3.

5、6 ESTABLISH LIQUID LEVELS IN TOWERS, T-202 AND T-2033.7 START COMPRESSORS3.8 CIRCULATE CHLOROSILANE LIQUIDS3.9 COMMISSION REFRIGERATION SYSTEM3.10 ESTABLISH TEMPERATURE PROFILE IN HCL TOWER, T-2033.10.1 COMMISSION PRESSURE CONTROL3.10.2 ADMIT STEAM TO REBOILER3.10.3 ESTABLISH REFLUX FLOW3.11 INCREAS

6、E FEED VENT GAS FLOW4.0 SHUTDOWNS4.1 PROCESS UPSETS4.2 LONG TERM UPSETS4.3 NORMAL SHUTDOWN5.0 OPERATING PROCEDURES5.1 TYPICAL COMPRESSOR STARTUP PROCEDURES (TO BE CONFIRMED BY COMPRESSOR VENDOR)5.2 CARBON LOADING PROCEDURE5.3 CARBON DRYING PROCEDURE6.0 SAFETY6.1 HYDROGEN SAFETY6.2 HCL SAFETY6.3 CHLO

7、ROSILANE SAFETYAPPENDIX A. SAFETY HCLB. SAFE HANDLING OF CHLOROSILANESC. FIREFIGHTING INSTRUCTIONS 1.0PROCESS DESCRIPTIONThe CVD Reactor Vent Gas Recovery Unit takes the vent gas from the reactors that deposit silicon on high temperature rods, and separates the stream into liquid chlorosilanes, hydr

8、ogen chloride gas, and hydrogen gas. The hydrogen gas is returned to the hydrogen system at very high purity (7.010.57.0Temperature, C45405020Composition, kg/hrH21,973nil1,9340.1HCl1,131200 wppmnil1,127SiH2Cl274.671.2nilnilSiHCl325,59325,183nilnilSiCl46,7446,709nilnilN2500 vppmnil500 vppmnilNotes:1.

9、 Nitrogen in feed gas is not removed by CDI unit.2. Flows listed above are shared between two vent gas recovery units.1.5.1 Detail of Performance TestDuring the initial startup, the adsorber heating and cooling system, the liquid chlorosilane circulation between the HCl Absorber, T-202, and the HCl

10、Distillation, T-203, can be proven at design rate. Compressors will also be proven at design capacity since feed compressor capacity control recycles gas from the discharge drum, D-204, to E-202. Depending on available reactor vent gas, it may be possible to prove capacity of the condensation equipm

11、ent, refrigeration systems, and carbon adsorbers.Flow meters and laboratory analysis of periodic samples will be used to construct a material balance based on the actual feed for a 24-hour period. Recovery of various compounds will be as follows:H2: 99.2% recoveryHCl: 99.3% recoveryDCS: 99.2% recove

12、ryTCS: 99.4% recoverySTC: 99.5% recoveryComposition of recovered streams will meet the requirements of the Contract and all Amendments.The recycled H2 gas shall produce polysilicon crystal product equivalent to that produced using vaporized liquid H2 in an evaluation reactor.1.6 UtilitiesSee utiliti

13、es summary (published separately) for estimated values. Please add an allowance for heat loss, etc.2.0PRE-STARTUP2.1 Install Tower PackingRemove liquid distributors and check bed support grids for T-202, and T-203. Install the following packing material in each tower:T-202 Top: 1,067 mm I.D. x 4,572

14、 mm 1” (25mm) diameter Pall RingsT-202 Bottom: 1,067 mm I.D. x 4,572 mm 1” (25mm) diameter Pall RingsT-203 Top: 914 mm O.D. x 2,000 mm Koch-Glitsch Flexipak 1.4YHC structured packingT-203 Middle: 914 mm O.D. x 1,000 mm Koch-Glitsch Flexipak 1.4YHC structured packingT-203 Bottom: 1,829 mm I.D. x 6,09

15、6 mm 2” (50mm) diameter Pall Rings As with all packed towers, good liquid distribution is critical to satisfactory operation. Confirm that liquid distributor trays are level, bolted down, and inlet distributor discharges liquid where desired.2.2 PumpsCheck pump breaker settings, and bump pumps to co

16、nfirm correct rotation.2.3 Fill and Dry Heating Medium SystemPurge entire system with dry compressed air or nitrogen to remove as much water, debris, and contaminants as possible.Check and clean strainers prior to P-205A/B/C.Use Nozzle A on expansion Tank, D-205, to fill with Syltherm XLT as necessa

17、ry. CDI recommends filling all three (3) vessels with Syltherm XLT at the same time. Using the pumps, flow through the cold heating medium supply valves and out the hot heating medium return valves. Adjust manual valves around P-205B to flow through the expansion tank and to use P-205A or B. After f

18、illing the lines, close the cold heating medium supply valves and hot heating medium return valves, then open the hot heating medium supply valves and the cold heating medium return valves. Adjust manual valves around P-205B to flow through the expansion tank and allow use of P-205 B or C. This will help remove all the air out of the piping. Open HPVs and LPDs, including the core vent on the adsorber (Nozzle K)Continue filling until level in expansion tank is