湿氧系统中英对照操作手册基本操作.docx

1、湿氧系统中英对照操作手册基本操作 操 作 手 册目录Preface.序言.IIITempress documentation set. 文件设置.IIIUser Definition. 用户定义.IVNotes, Cautions and Warnings.注意，小心，警告.VContents description.VIRevision History.VI1. Introduction.1-11.1 General.1-11.2 Operator area description.1-22. Safety.2-22.1 Emergency Off (EMO).2-22.2 Alarm Si

2、gnals.2-22.2.1 Buzzer / LED.2-22.2.2 Touchscreen.2-22.2.3 Light tower.2-32.2.4 TSC Alarm menu.2-32.3 Light tower signal description (optional).2-32.4 Toxic Material.2-52.5 Safety measures.2-53. Operator Instructions.2.5-13.1 Load or Unload process wafers.3.1-13.1.1 Load process wafers.3.1-13.1.2 Unl

3、oad wafers.3.1-13.2 Selecting a new process recipe.3.2-13.2.1 Touchscreen.3.2-13.2.2 TSC-2.3.2-33.3 Start/Continue a new process recipe.3.3-13.3.1 Touchscreen.3.3-13.3.2 TSC-2.3.3-23.4 Stop a running process recipe.3.4-13.4.1 Touchscreen.3.4-13.4.2 TSC-2.3.4-23.5 Abort a running process recipe.3.5-1

4、3.5.1 Touchscreen.3.5-13.5.2 TSC-2.3.5-23.6 Clear Alarms.3.6-13.6.1 Required action.3.6-13.6.2 Touchscreen.3.6-13.6.3 TSC-2.3.6-2Preface序言This set of manuals explains how to operate a Horizontal Diffusion/LPCVD furnace.这套手册是操作水平扩散炉/ LPCVD的说明。Refer to the Touchscreen reference manual (M440.01) or the

5、 TSC-2 reference manual (M450.03) for a full description of all operating screens.触摸屏参考手册(M440.01)和TSC-2参考手册是操作触摸屏的说明。For information about processing refer to the Process Manual (M220.xxx.02).工艺手册(M220.xxx.02)是工艺过程的信息。The Tempress Horizontal Diffusion Furnaces are fully described in the reference m

6、anuals (M300 series).参考手册(M300 series).是描述Tempress水平扩散炉的。Tempress documentation set 文件设置The complete Tempress documentation set includes: 全部的文件包括 Safety manual 安全手册 Operator manual 操作手册 Reference manuals 参考手册1. Loadstation 装载区2. Furnace 炉子3. Gas cabinet 气柜4. Main Power cabinet 电源柜5. DPC6. DTC7. Touc

7、hscreen 触摸屏8. TSC-2 (+ optional SECS/GEM) Vendor documentation 卖主文件Deliverys on request: 按要求交付 Desired vendor documentation Sic and Quartz drawings Sic和石英器件的图纸 RS422 protocol (DPC/DTC)User Definition 用户定义It is strongly recommended that all users first read this manual before starting any procedure.

8、To produce an accessible manual suiting on various responsibilities, Tempress defines the following users: 特别建议开始所有程序之前，先看这本手册。为不同职责的人编写一本易懂的操作手册，Tempress定义了以下用户：Operator 操作人员The operator is handling the process from loading until unloading of the wafers. Therefore the operator needs to select a rec

9、ipe, put the wafers on the boat, fill in Lot ID, Start the process, monitor the progress and unload wafers.操作人员的操作过程是从装载硅片到卸载硅片。但是操作人员需要选择工艺菜单，装载硅片，填写产品批号，启动工艺和监控运行过程及卸载硅片Process engineer 工艺工程师The process engineer is a qualified chemical engineer, who is responsible for the process recipes and their

10、 results. The process engineer writes, tests and releases new process recipes.工艺工程师是有资格的化学工程师，他负责工艺菜单和结果，需要编写、测试和投放新的工艺菜单。Service or Maintenance engineer 维修工程师The maintenance engineer is a qualified electrician or mechanic, who is responsible for a proper functioning system in accordance to its desi

11、gnated purpose. A Tempress qualified service engineer will perform the first installation.维修工程师是有资格的电工或技工，他要负责设备按设定的目的正常运行。Tempress的维修工程师会完成初始的安装。Notes, Cautions and Warnings注意，小心，警告Notes, Cautions and Warnings appear throughout this manual, where extra attention is required to a particular (safety)

12、 item. Three levels can be distinguished:特别注意的地方会有特别提醒，注意，小心，警告要贯穿整个手册，并分为三个等级：NOTE 注意Notes alert to pay attention to items or procedures of special importance. 注意是提醒特别重要的项目或程序CAUTION 小心Cautions alert for a potentially hazardous situation that may result in minor or moderate injuries.Cautions can al

13、so alert for potential equipment and/or product damage.小心是提醒有潜在的危险境况，会导致小的或中度的工伤。提醒有设备或产品的潜在损害。WARNING 警告Warnings alert for conditions that may result in permanent and/or lethal injuries.警告是提醒有永久或致命的伤害。Contents description 内容简介This manual is divided into the following sections and appendices: 手册分为下面

14、几个部分和附录Section 1 Introduction 简介Provides an overview of the Tempress Systems Inc. Horizontal furnace.Tempress公司水平炉子的简介Section 2 Safety 安全Describes the safety components and functions. It describes all measures that are required to provide a safe way of working.描述安全组分和作用。 它描述为提供一个安全工作的所有措施。Section 3

15、Operator Instructions 操作说明Describes all procedures that are required for the operator.描述为操作员需要的所有规程Revision History 版本的历史This manual is revision 1 of the Operator Manual and is intended to explain the required operator procedures. The function and screens it describes are based on the following soft

16、ware releases:说明操作程序的操作手册是第一个版本，其中功能和屏幕的描述是基于以下软件版本： TSC 2 version 6.3 (17-02-2003) DPC 2.I.03 (17-02-2003) DTC 2.F.02 (17-02-2003) Touchscreen 2.I.05 (17-02-2003)For minor software and hardware changes, addendum to this manual will be available. For major changes, a new revision will be available.

17、For information or other questions please contact Tempress Systems Inc.一些小的软件和硬件的变化会加在附录里。大的变化就会有一个新的版本。其他问题请联系厂家。1.Introduction 简介1.1 General 概要The horizontal furnaces of Tempress Systems Inc. are developed according to the European directives for Machinery (98/37/EC), Low Voltage (73/23/EC) and EM

18、C (89/336/EEC).The Tempress Diffusion system is a modular horizontal furnace designed to process (silicon) wafers as part of the manufacturing technology of semiconductor, optical, MEMS and solar devices.公司的水平炉子是依照Machinery (98/37/EC), Low Voltage (73/23/EC) and EMC (89/336/EEC)的欧洲标准发展的。该公司的扩散炉是为半导体

19、、光学、MEMS和太阳能器件中的硅片处理工艺设计的有标准组件的水平炉子。Figure 1-1 shows an example of a standard L-shape diffusion system with 4 process tubes shown without the partition of a cleanroom wall. It is a right-handed system, defined according to the position of the furnace relative to an operator. Usually the system conta

20、ins more than 1 tube. Based on the number and size of tubes, the system is referred to as a 2, 3 or 4 stack.Figure 1-1 is an example of a 4-stack system, allowing up to 4 different processes at any time. The tubes are numbered from 1 to 4, with tube number 1 at the top and tube 4 at the bottom. All

21、tubes operate fully independently.图1-1是一个标准的L型四管扩散炉，没有超净间的隔离墙。对于操作人员来说是右手操作。一般系统不止一个炉管，基于炉管的数量，系统分为2、3或4管炉。图1-1是个四管炉，容许4个不同的工艺同时进行。四个管的编号是1在顶部，4在底部，所有的管是完全独立的。Figure 1-1 Schematic view of a right-handed 4-stack Diffusion System1.2 Operator area description 操作区介绍The operator area is limited to the lo

22、adstation only. Figure 1-2 shows the relevant items.The Loadstation part of a Tempress System should be placed in the cleanroom. The Furnace and Gas cabinet can optionally be placed in the greyroom.操作区只限于装载区，如图1-2所示。装载区必须置于千级间，炉体和气柜置于万级间。Figure 1-2 LoadstationTo load wafers, several loader types can

23、 be implemented, including the (default) inline loader, the Amtech Atmoscan, and the backmounted softlander. To prevent particles on the wafers during the loading process, a constant horizontal laminar flow is created from the loadstation into the cleanroom.装载硅片有几种装载类型，如联机式、Amtech Atmoscan和backmount

24、ed softlander类型，在装片过程中为防止微粒落入硅片，千级间的装载区要开启水平的气流吹扫。The loadstation is powered by 220V and has an illuminated On/Off switch for the fans and the lights.The remote control cabinet in the loadstation contains TFT-Touchscreens, one for each tube. These supply the user interface for communication with the Digital System Controllers (Digital Process Controller, Digital Temperature Controller and Digital Motion Controller).装载区要有220v的电源，以及风扇和灯的照明开关。装载区的