超净实验室实验报告.docx

1、超净实验室实验报告超净实验室 实 验 报 告( 2011 / 2012 学年 第 二 学期) 课程名称 超净工作实习 实验名称 超净工作实习 实验时间 2011/2012学年第二学期(9-10周) 指导单位 材料科学与工程学院 指导教师 王义成 学生姓名 戴祥祥 班级学号 B09070532 学院(系) 材料科学与工程学院 专 业 材料物理 Is team-oriented and team building. Persisting in democratic centralism, improve the level of team science decision, a democrati

2、c decision. Strengthening the concept of collective leadership, by collective discussions and decisions on major issues. 5 years, between members of the team did Frank, equal treatment, mutual trust, mutual support and form a innovation-oriented, democratic solidarity and diligent people, honest typ

3、e of four good teams. Second, focus on the transformation of work style. Requires team members to actively think, active officers to organize work, active inspection work, initiative, by the Office and of the primary station and village (community), and make sure regardless of Division of labor and

4、mutual support, mutual Help and complement each other, understand each other, improve leadership skills of managing. Third party organizations are weak and lax, strengthening regulation (community) party organizations and cadres, improve service levels, and enhance team effectiveness. The work style

5、 of the party members and cadres in the whole town has been further changes. 2. the cadres, and improve the overall quality of party members and cadres. First, grasp the cadres team construction. Cadres of the new and improved the regulation, the town village appraisal methods, training of party mem

6、bers and other 8 work, effectively promote the work, put an end to the previous shuffle, prevarication is not responsible for the phenomenon. Second, strengthening the construction of grassroots party organizations and party members. Catch the party branch Secretary of team-building, improving overa

7、ll quality. Healthy village (community) cadre appointment system. Perfect village 超净实验室简介 一(超净实验室的定义 在国际标准化组织ISO中超净实验室被定义为: 一个空气中的微粒浓度被控制、被建设用于减少房间内微粒的引进、产生和滞留，且其他有关参数如温度、湿度、压力必要时也被控制的实验室。 二(超净实验室的用途 工业 产品 电子工业 电脑，平面显示屏 半导体 用于计算机存储器和控制器的集成电路 光学器件 柔性焦距透镜组，激光设备 生物技术 抗生素的生产，遗传工程 制药业 无菌药品，无菌一次性用品 医疗设备 心

8、脏瓣膜，心脏旁路系统 食物和饮料 啤酒的生产 从上面的表格中可以看出，超净实验室的应用可以大致分为两类: 三(超净实验室的发展史 早期(只在医院里有超净室，很少有通风 设备)具备通风设备的用于手术的超净室早期的供工业用的超净室均匀流型超净室 超净实验室的设计标准 一(设计超净实验室的三个经典条件 1、当建立了超净实验室并安装好各个仪器; 2、当所有设备安装好并能够运行而且不受人为因素的干扰 3、当超净实验室可操控并设备能够运行，人员在工作。 二(设计方针 , 晶片生产设备的建造和运转费用非常高，两年内就可以被取代，寿命最多就五年。所以头两年必须产生足够的利润去抵消建造和运转成本，否则成功的概率

9、非常小，所以必须坚定地控制建造和运转费用。 ISO超净实验室设计标准应用于一般洁净室设施，它之所以有价值,是因为它不是特定工艺标准,各种优质的地方使用。 , 空中悬浮微粒的清洁程度分类; , 生物污染 , 计量及测试方法 , 设计、施工和启动 , 超净实验室运行 Is team-oriented and team building. Persisting in democratic centralism, improve the level of team science decision, a democrat第 1 页 ic decision. Strengthening the conc

10、ept of collective leadership, by collective discussions and decisions on major issues. 5 years, between members of the team did Frank, equal treatment, mutual trust, mutual support and form a innovation-oriented, democratic solidarity and diligent people, honest type of four good teams. Second, focu

11、s on the transformation of work style. Requires team members to actively think, active officers to organize work, active inspection work, initiative, by the Office and of the primary station and village (community), and make sure regardless of Division of labor and mutual support, mutual Help and co

12、mplement each other, understand each other, improve leadership skills of managing. Third party organizations are weak and lax, strengthening regulation (community) party organizations and cadres, improve service levels, and enhance team effectiveness. The work style of the party members and cadres i

13、n the whole town has been further changes. 2. the cadres, and improve the overall quality of party members and cadres. First, grasp the cadres team construction. Cadres of the new and improved the regulation, the town village appraisal methods, training of party members and other 8 work, effectively

14、 promote the work, put an end to the previous shuffle, prevarication is not responsible for the phenomenon. Second, strengthening the construction of grassroots party organizations and party members. Catch the party branch Secretary of team-building, improving overall quality. Healthy village (commu

15、nity) cadre appointment system. Perfect village, 条件,定义和单位 , 增强清洁设备 , 分子污染 三(布局 图3.1的超净室设计已经流行数年 a.舞厅式b.管槽式c.微环境室 a.舞厅式b.管槽式c.微环境室 Is team-oriented and team building. Persisting in democratic centralism, improve the level of team science decision, a democratic decision. Strengthening the concept of c

16、ollective leadership, by collective discussions and decisions on major issues. 5 years, between members of the team did Frank, equal treatment, mutual trust, mutual support and form a innovation-oriented, democratic solidarity and diligent people, honest type of four good teams. Second, focus on the

17、 transformation of work style. Requires team members to actively think, active officers to organize work, active inspection work, initiative, by the Office and of the primary station and village (community), and make sure regardless of Division of labor and mutual support, mutual Help and complement

18、 each other, understand each other, improve leadership skills of managing. Third party organizations are weak and lax, strengthening regulation (community) party organizations and cadres, improve service levels, and enhance team effectiveness. The work style of the party members and cadres in the wh

19、ole town has been further changes. 2. the cadres, and improve the overall quality of party members and cadres. First, grasp the cadres team construction. Cadres of the new and improved the regulation, the town village appraisal methods, training of party members and other 8 work, effectively promote

20、 the work, put an end to the previous shuffle, prevarication is not responsible for the phenomenon. Second, strengthening the construction of grassroots party organizations and party members. Catch the party branch Secretary of team-building, improving overall quality. Healthy village (community) ca

21、dre appointment system. Perfect village 四(空气循环系统 图3.8是典型的空气流动系统，它用来实现对穿过地板高效空气过滤器的空气的再循环。 典型的再循环空气移动系统有如下特征和要求 , 风扇类型(发动机在空气流缓外部); , 风扇的结构放在具有分离基本设备的薄片制造区域外围; , 发动机和风扇要远离薄片制造区域; , 由于空气通道打，这要求消声处理设计 , 冷线圈要在风扇的逆方向。 五(监控和报警系统 , 监控和警报系统在晶片的生产中拥有很高的优先级，所以其设计也是相当重要。设计者要考虑一下几点: 1.液体，工业气体，环境气体的纯净度和实际条件 2.人员

22、安全、车间和工艺设备 3.产品产量和质量 4.对于废水毒性或声誉的社区关系 5.政府机构要求的控制、计量和报告 6.设施和公用工程系统的工作特性的条件和安全。 空气净化 一(高效空气过滤 , 供应到洁净室里面的空气必须先进行过滤，这是为了确保去除空气中的颗粒和微Is team-oriented and team building. Persisting in democratic centralism, improve the level of team science decision, a democrat第 3 页 ic decision. Strengthening the conce

23、pt of collective leadership, by collective discussions and decisions on major issues. 5 years, between members of the team did Frank, equal treatment, mutual trust, mutual support and form a innovation-oriented, democratic solidarity and diligent people, honest type of four good teams. Second, focus

24、 on the transformation of work style. Requires team members to actively think, active officers to organize work, active inspection work, initiative, by the Office and of the primary station and village (community), and make sure regardless of Division of labor and mutual support, mutual Help and com

25、plement each other, understand each other, improve leadership skills of managing. Third party organizations are weak and lax, strengthening regulation (community) party organizations and cadres, improve service levels, and enhance team effectiveness. The work style of the party members and cadres in

26、 the whole town has been further changes. 2. the cadres, and improve the overall quality of party members and cadres. First, grasp the cadres team construction. Cadres of the new and improved the regulation, the town village appraisal methods, training of party members and other 8 work, effectively

27、promote the work, put an end to the previous shuffle, prevarication is not responsible for the phenomenon. Second, strengthening the construction of grassroots party organizations and party members. Catch the party branch Secretary of team-building, improving overall quality. Healthy village (commun

28、ity) cadre appointment system. Perfect village生物，以防止它们妨害在洁净室里面的实验。 , 直到二十世纪八十年代初，当时洁净室里面最高效的空气过滤器是HEPA过滤器，亦称高效空气净化器，它对空气中直径0.3微米的微粒可以有至少99.97%的过滤效率。现今，仍然有许多洁净室在使用HEPA。 二、高效过滤器的结构 高效过滤器一般有两种结构，深褶式过滤器和迷你褶式过滤器。 深褶式过滤器具有比较传统的过滤器结构:在其中，滤纸像折扇一样并排折叠起来，每个折叠的部分相距15cm到30cm之间(6-12英寸)。 结构如右图: 过滤介质 放置铝箔隔离板 为了确保空

29、气通过过滤纸以及加强过滤器强度，在过滤纸之间会放置皱褶的铝箔作为隔离板(前页红箭头)。之后隔离板与滤纸结合的过滤装置就会用密封剂粘合到塑料、木材或者是金属的外框中，过滤器的整体如图: 外框 密封胶 密封衬垫 迷你褶式过滤器大都用在单向流洁净室。因为其更大的过滤面积所产生的压降低于深褶式过滤器。 因为一个过滤器两端的压降取决于空气通过过滤介质的流速以及过滤介质的结构。通过过滤器的空气流速通常认为是0.5米/秒。在这个速度下，压降通常介于120帕到170帕之间。当压降达到原来气压的2.5到3倍，过滤器通常是无法承受的。更大的过滤面积产生的压降比较低，故迷你褶式过滤器能使用于单向气流洁净室中。 Is

30、 team-oriented and team building. Persisting in democratic centralism, improve the level of team science decision, a democratic decision. Strengthening the concept of collective leadership, by collective discussions and decisions on major issues. 5 years, between members of the team did Frank, equal

31、 treatment, mutual trust, mutual support and form a innovation-oriented, democratic solidarity and diligent people, honest type of four good teams. Second, focus on the transformation of work style. Requires team members to actively think, active officers to organize work, active inspection work, in

32、itiative, by the Office and of the primary station and village (community), and make sure regardless of Division of labor and mutual support, mutual Help and complement each other, understand each other, improve leadership skills of managing. Third party organizations are weak and lax, strengthening regulation (community) party organizations and cadres, improve service levels, and enhance team effectiveness. The work style of the party members and cadres in the whole tow