四探针法测电阻率Word文档下载推荐.docx

1、对于薄层材料或外延材料选取200g。7当室温有较大波动时，最好将电阻率折算到23时的电阻率。因为半导体的电阻率对温度很敏感。如果有必要考虑温度对电阻率的影响，可用下面的公式进行计算式中参考为修正到某一参考温度（例如23）下的样品电阻率; 平均为测试温度下样品的平均电阻率；CT为温度系数，它随电阻率变化的曲线示于图5；T为测试温度；T参考为某一指定的参考温度。5附录附录1A 样品厚度修正系数G（）样品厚度较薄：=0.0011 见表5W：样品厚度（m）：S：探针间距（mm）W/SW234567890.000.020.030.040.050.060.070.080.090.100.110.120.1

2、30.140.150.160.170.180.190.200.210.220.232030405060708090110120130140150160170180190200210220230.000.007.014.022.029.036.043.051.058.065.072.079.087.094.101.108.115.123.130.137.144.151.159.166.001.008.015.030.037.044.066.073.080.095.102.109.116.131.138.145.152.167.009.016.023.038.045.052.059.074.081

3、.088.110.117.124.139.153.160.002.017.024.031.053.060.067.082.089.096.103.118.125.132.146.154.161.168.003.010.025.032.039.046.061.068.075.097.104.111.126.133.140.147.162.169.004.011.018.040.047.054.069.076.083.090.105.112.119.141.148.155.170.012.019.026.033.048.055.062.077.084.091.098.113.120.127.134

4、.149.156.163.005.027.034.041.056.063.070.092.099.106.128.135.142.157.164.171.006.013.020.035.042.049.071.078.085.100.107.114.121.136.143.150.172.021.028.050.057.064.086.093.122.129.158.1650.240.250.260.270.280.290.300.310.320.330.340.350.360.370.380.390.400.410.420.430.440.450.460.470.480.490.502402

5、50260270280290300310320330340350360370380390400410420430440450460470480490500.173.180.188.1953202.209.216.224.231.238.245.252.260.267.274.281.288.296.303.310.317.324.331.338.346.353.360.174.181.203.210.217.232.239.246.253.268.275.282.289.311.318.325.332.339.175.182.189.19.211.218.225.247.254.261.283

6、.290.297.304.319.326.333.340.347.354.361.183.190.197.204.219.226.233.240.255.262.269.276.291.298.305.312.341.348.355.362.176.198.205.212.227.234.241.248.263.270.277.284.306.313.320.327.334.363.177.184.191.199.213.220.242.249.256.278.285.292.299.314.321.328.335.342.349.356.185.192.206.214.221.228.235

7、.250.257.264.271.286.293.300.307.329.336.343.350.357.364.178.193.200.207.229.236.243.265.272.279.301.308.315.323.351.358.365.186.201.208.215.222.237.244.251.258.273.280.287.294.316.330.337.344.187.194.223.230.259.266.295.302.309.345.352.3593.680.510.520.530.540.550560.570.580.590.600.610.620.630.640

8、.650.660.670.680.690.700.710.720.730.740.750.760.77510520530540550560570580590600610620630640650660670680690700710720730740750760770.367.374.381.388.395.402.409.416.422.429.436.443.450.456.463.470.476.483.489.496.502.508.515.521.527.533.540.368.375.382.389.396.423.430.437.444.457.464.477.490.503.509

9、.516.522.528.534.403.410.417.424.431.451.458.471.484.491.497.510.529.535.541.369.376.383.390.397.404.411.418.425.438.445.452.465.472.478.485.498.504.517.523.370.377.384.391.398.405.432.439.446.459.466.479.492.505.511.524.530.536.542.412.419.426.433.453.460.473.486.499.512.518524.537.543.371.378.385.

10、392.399.406.413.420.427.440.447.454.467.474.480.487.493.500.506.519.525.531372.379.386.393.400.407.414.434.441448454461.468.481.488.494.507.513.532.538.544.421.428.435.442.448.455.462.468.475.501.514.520.526.373.380.387.394.401.408.415.449.469.482.495.539.5450.780.790.800.810.820.830.840.850.860.870

11、.880.890.900.910.920.930.940.950.960.970.980.991.007807908108208308408508608708808909009109209309409509609709809901000.546.552.558.564.569.575.581.587.592.598.603.609.614.619.625.630.635.640.645.650.655.660.665.570.576.593.604.615.620.636.641.646.651.656.547.553.559.565.571.582.588.599.610.621.626631.641.661.577.583.594.605.616.631.637.642.647.652.657.548.554.560.572.589.600.611.622.627.632.662.549.555.561.567.573.579.584.596.601.607.612.617.623.628.633.638.643.648.653.658.663.590.550.556.562.568.585.591.602.613.618.634.639.644.649.654.574.580.597.608.624.629.664.551.557.563.586