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真空泵英文文献
VacuumPumpOverview
XueJianguo
(JiangsuAsiaPacificpumpvalvetechnologylimitedcompany,JiangsuTaizhou225400)
Abstract:
Vacuumpumpisanenormousquantityofproducts,yieldgreatwide,theoutputisnothigh,butitisreallyadirectlyaffectthevacuumequipmentperformancequalityindispensablebasedproducts.Thevacuumpumpmarketinaccordancewiththeneedsofusersandhappendynamics.Marketgrowthfromthemaindrivingforceoftherapiddevelopmentofthesemiconductorindustryanddrypumpandmolecularpumpapplicationfieldofwidening.
Keywords:
vacuumpump;marketdevelopment;expand
Introduction:
Atpresent,thevacuumpumpmarketsalesofabout$20billioninannualratearound7%.Ourproductionofvacuumpumpmanufacturerofvacuumpump,allinmanysalesareabout1.5billionyuan,isonlyAmericanKINNEYcompanyannualsalesofvacuumpump[1,2].Basedontheanalysisofglobalvacuumpumpmarketwecanseethatalltypesofvacuumpumpmarketandapplicationfieldsareconstantlychanginganddeveloping.Ourcountryvacuumpumpmanufacturinghasalonghistoryandstrongfoundation,homebredvacuumpumphasbeenappliedinmanydifferentfieldsandvalidated,somepumpsalsoexportedabroad,getforeigncustomersapprovalandgoodreputation,itshouldbesaidthatChinavacuumpumpmanufacturingindomesticandinternationalmarketstillhasthehugedevelopmentspace.
1.Water-ringvacuumpump
Althoughwater-ringvacuumpumpbelongstoroughvacuumpumps,butinourcountryofpetroleum,chemicalindustry,electricpower,textile,paper,pharmaceuticalproductsstillhasalargemarket.Inaforeigncountry,waterringvacuumpumpssalestotalmarketof14%[3],afterdrypump,soSEIMEMSandNASH,suchcompaniesinChinaKINNEYinvestmentandconstructionorestablishsalesnetwork,andconstantlyexpandinourmarketshare[3].Becausewaterringpumpsaremostlycasting,processingrequirementsarenothigh,oflabor-intensiveproducts,sothedomesticwaterringpumponpricecompetitiveadvantage,thekeyistodesignimprovement,narrowthevolume,loseweight,increaseefficiency,reducetheenergyconsumption.
2.Rotarypistonpump
Rotarypistonpumpisakindofoilsealtypevacuumpump.Becauserotarypistonpumpmoredurable,reliable,variousdomesticandinternationalvacuumfurnace,coatersanddryingequipment,dippingwithrotarypistonpumpisaformerlevelrotarypistonpumppump,butcastingheavy,processinglargerworkload,sotheforeignvacuumfactoryallseekpartnershipinChina.Inordertomakethehomemaderotarypistonpumpcanentertheinternationalmarket,wemustfurtherreducepumpvibrationnoise,preventleakageandimproveinjectionandrotarypistonpumplong-termoperationreliability.
3.Straightleaguerotaryvanepumps
Alongwiththevacuumtechnologyineachapplicationdomainexpandsunceasingly,straightleaguerotaryvanepumpsthegrowingdemand.Becauseofthispumpnumber,processingandassemblingworkloadisverybig,priceisverylow,sosomeforeignvacuummanufacturersinChinabuildplants.Domesticsmallandmedium-sizedstraightleaguerotaryvanepumpsintechnologyhavepass,priceandfarthanforeignpumpcheap,sodomesticpumpstillhasacompetitiveadvantage,thekeyistosolvetheshaftsealleakageandrotaryvanematerialsandvacuumpumpoilperformancequalityproblems,ensurethatstraightleaguepumpinthehighspeed,hightemperatureperformanceisstableandreliableoperation,andmeanwhile,furtherimprovethedomesticstraightleaguerotaryvanepumpsbesideswatervaporability.
4.ROMBatesvacuumpump
FromabroadROMBatesvacuumpumpproductionsituation,theforeignseveralbigcompanies,suchastheLEYBOLD,ALCATELLBALZERS,EDWARDSandULVAC,theyeachROMsalesofBatespumpofworldROMBatespumpsalesproportionofmorethan5%,whicharenotonly20%,total5homeBatespumpoutputrobbenisnotbig,butforeignROMBatespumppricesthandomesticpumpismuchhigher[4].Atpresent,thedomesticandforeignalmostallthelargeorsmallhighvacuumandvacuumsystem,inordertoshortenthesuctiontimeandimproveproductionefficiencyisequippedwithROMBatespump,sohomebredROMBatespumpmustbeinoccupieddomesticmarketbasedonmanagedtoentertheinternationalmarket,sowemustfurtherreducedomesticROMBatespumpvibrationnoise,thoroughlysolvetheshaftsealleakageproblemandimprovethequalityandimprovetheappearanceofthepumpinsidethefinishandcleannessofpump.Additional,evenconsideringsomecountriesandregionsofpowerfrequencyfor60HZ,moremakesurePaulBatespumpinimprovingspeedundertheconditionofthelong-termoperationalreliability.
Atpresent,thedomesticairtypein-lineatmosphericROMBatespumpprogresssoon,technologyhasmaturedon.Becauseofthispumpintheventbelowcontaininggascooler,onepartiscooledtheairthroughpipelinepumpchambertocooltherotorreturns,thusmakerefrigeratorheattobebalanced,sothiskindofpumpcanbein-lineatmosphere.Inordertomeetdifferentrequirementsoflimitingvacuumpumpseries,thiscanbeused,generalappendingaairtypein-lineatmosphericROMBatespumps,reachlimitvacuumpumphighlevelthanbeforeanorderofmagnitude.Thispumpbecauseinpumpchamberwithoutworkingmedium,isactuallybelongtodrypump.Atpresent,thiskindofairtypein-lineatmosphericROMBatespumpandcrewhaveinpetroleum,chemical,plastic,pesticide,turbinerotordynamicbalance,aerospacespacesimulationdevicegotlong-termoperationofthetest,soitshouldbepopularizedandappliedinChina[5].
5.Molecularpump
Molecularpumpinthefieldofmanyforeignsemiconductorprocessoccasionisusedinsteadofcryogenicpumps,especiallysputtering,etchingandLCVDdevicesareadoptedcomplexmolecularpumpandtractionpumpasthemainpump.
Becauseofmolecularpumptowatervaporisonlythepumpingspeedwithdiametercryogenicpumpspumpingspeedinthequarter,somolecularpumpexhausttimethancryogenicpumpslong.Inordertoimprovethepumpingspeed,foreigninmolecularpumpinletsidetoinstalla-130℃~150℃low-temperaturecooling-plate,calledlow-temperaturemolecularpump,vaporbylow-temperatureboard,othergasiscapturedbymolecularpumpedaway[6].Thiskindoflowmolecularpumpinthevacuumcoatingonthedeviceapplication,itraisedproductionefficiencyandimprovesthecoatingquality.WithChina'ssemiconductorindustry,filmindustryandscientificresearchundertakingdeveloprapidly,molecularpumpshouldbefocusingonthedevelopmentofourcountryvacuumpumpmanufacturing.First,molecularpumptoestablishacompleteseriesofchildhood,andresearchanddevelopmentofdifferentcomplexmolecularpump,tractionpumpandlowtemperaturemolecularpump,inordertomeetdifferentsituationtheneed.
6.Drytypemechanicalvacuumpump
Foreigndrytypemechanicalvacuumpumpmarketisgrowing,itsmaindrivefromthesemiconductorindustry,chemicalindustry,filmindustryrapiddevelopment.InJapan,semiconductorindustryisfullalreadyusedryvacuumpumpoilsealtypeJiXieBeng,euramericaninsteadofsemiconductorindustrymorethan45%replacedwithdryvacuumpumpoilsealtypeJiXieBeng,greatlyimprovingtheproductperformanceandquality.Inordertomeetdifferentapplicationsandrequirementsofdifferentworkingconditions,abroadhavemultistageROMBatesvacuumpump,multi-stageclawtypevacuumpump,screwvacuumpumpandthevacuumpump,reciprocatingtypevortexpistonvacuumpumpandturbineoilfreepumpetc.Extremepressurefrom10PA~10-2PA,pumpingspeedfrom20M3/H~500M3/H.Accordingtostatistics,atpresentdomesticdrypumpapplicationisinsufficientstill1%[7],domesticsemiconductorindustrywithdrypumpallimportedfromabroad,itspriceisveryexpensive.Therefore,ourcountryshouldvigorouslyresearchanddevelopmentdrypump,andletthedryvacuumpumpbecomeChina'sindustrialneweconomicgrowthpoint.
7、Vacuumpumptechnologyprogresstrend
Technologyistheimpulsionofthedemandofthemarket.Becausethevacuumtechnology,expansionandtherapidgrowthofhigh-tech,thedomesticmarkettothevacuumpumptechnologylevelputforwardhigherrequest.Thevacuumpumpproductionenterprisesmustthroughtechnicalinnovationandtheadjustmentofproductmixtwowaystopreservetheoriginalmarket,andthuscontinuetoexpandthemarketshare.
7.1、Enhancethevacuumpumpreliability,reducethevibrationandnoise,payattentiontothevacuumpumpcomprehensivelevel.
Overthepastseveralyears,vacuumpumpmanufacturerpaysattentiontomainperformanceindexes,suchas,extremepressure,pumpingspeedetc,andignorethevacuumpumpcomprehensiveperformance.Andnow,productreliability,performancestabilityandtheenvironmentpollutioncausedbygraduallybecomeusersbuyproductsfactors.Forrotaryvanepumps,,rotarypistonpump,luoBatespumpconcernedwillmaturesuchreliabilitydesignconceptappliedtovacuumpumpdesign,thereliabilitydesign,reliabilityexperimentstodramaticallyimproveaspectsthefreetime,vacuumpumpreliability,stabilityandlife,ensurevacuumpumpcanundervariousworkingconditionslong-termreliableoperation.Byadoptingnewtechnology,newmaterial,newstructuretoreducethevibrationandnoise,solvepumpoilspraying,oilleakageproblem,butalsoacleanuserfriendlyworkingenvironment.
7.2、Vacuumpumptoindividuation,diversificationdevelopment.
Enterprisefaceiseverchangingmarket,andourvacuumpumpproductsbutwakinggreatly.Productandmarketofcohesion,makewedon'tlosemanyopportunities.Thevacuumpumpnextdevelopmentshouldbefacingpersonalizedand